3/29/2010	8:41:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	8:41:24 AM	Recipe started at 8:41 AM
3/29/2010	8:41:24 AM	H2 valve closed
3/29/2010	8:41:24 AM	BCl3 valve closed
3/29/2010	8:41:24 AM	PH3 valve closed
3/29/2010	8:41:24 AM	SiCl4 pre valve closed
3/29/2010	8:41:24 AM	SiCl4 post valve closed
3/29/2010	8:41:24 AM	Main Vac valve closed
3/29/2010	8:41:24 AM	Bypass valve closed
3/29/2010	8:41:24 AM	Bubbler valve closed
3/29/2010	8:41:24 AM	Helium valve opened
3/29/2010	8:41:24 AM	Helium MFC set to  500.000000
3/29/2010	8:41:24 AM	H2 MFC set to  0.000000
3/29/2010	8:41:24 AM	BCl3 MFC set to  0.000000
3/29/2010	8:41:24 AM	SiCl4 MFC set to  0.000000
3/29/2010	8:41:24 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	8:41:24 AM	Tube furnace set to 0
3/29/2010	8:42:44 AM	Helium valve closed
3/29/2010	8:42:44 AM	H2 valve closed
3/29/2010	8:42:44 AM	BCl3 valve closed
3/29/2010	8:42:44 AM	PH3 valve closed
3/29/2010	8:42:44 AM	SiCl4 pre valve closed
3/29/2010	8:42:44 AM	SiCl4 post valve closed
3/29/2010	8:42:44 AM	Main Vac valve closed
3/29/2010	8:42:44 AM	Bypass valve closed
3/29/2010	8:42:44 AM	Bubbler valve closed
3/29/2010	8:42:44 AM	Helium MFC set to  0.000000
3/29/2010	8:42:44 AM	H2 MFC set to  0.000000
3/29/2010	8:42:44 AM	BCl3 MFC set to  0.000000
3/29/2010	8:42:44 AM	SiCl4 MFC set to  0.000000
3/29/2010	8:42:44 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	8:42:44 AM	Tube furnace set to 0
3/29/2010	8:42:45 AM	Run finished at 8:42 AM
3/29/2010	8:42:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	8:55:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	8:55:47 AM	Recipe started at 8:55 AM
3/29/2010	8:55:47 AM	Helium valve closed
3/29/2010	8:55:47 AM	H2 valve closed
3/29/2010	8:55:47 AM	BCl3 valve closed
3/29/2010	8:55:47 AM	PH3 valve closed
3/29/2010	8:55:47 AM	SiCl4 pre valve closed
3/29/2010	8:55:47 AM	SiCl4 post valve closed
3/29/2010	8:55:47 AM	Main Vac valve closed
3/29/2010	8:55:47 AM	Bubbler valve closed
3/29/2010	8:55:47 AM	Bypass valve opened
3/29/2010	8:55:47 AM	Helium MFC set to  0.000000
3/29/2010	8:55:47 AM	H2 MFC set to  0.000000
3/29/2010	8:55:47 AM	BCl3 MFC set to  0.000000
3/29/2010	8:55:47 AM	SiCl4 MFC set to  0.000000
3/29/2010	8:55:47 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	8:55:47 AM	Tube furnace set to 0
3/29/2010	8:56:19 AM	Helium valve closed
3/29/2010	8:56:19 AM	H2 valve closed
3/29/2010	8:56:19 AM	BCl3 valve closed
3/29/2010	8:56:19 AM	PH3 valve closed
3/29/2010	8:56:19 AM	SiCl4 pre valve closed
3/29/2010	8:56:19 AM	SiCl4 post valve closed
3/29/2010	8:56:19 AM	Bubbler valve closed
3/29/2010	8:56:19 AM	Main Vac valve opened
3/29/2010	8:56:19 AM	Bypass valve opened
3/29/2010	8:56:19 AM	Helium MFC set to  0.000000
3/29/2010	8:56:19 AM	H2 MFC set to  0.000000
3/29/2010	8:56:19 AM	BCl3 MFC set to  0.000000
3/29/2010	8:56:19 AM	SiCl4 MFC set to  0.000000
3/29/2010	8:56:19 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	8:56:19 AM	Tube furnace set to 0
3/29/2010	8:56:19 AM	Run finished at 8:56 AM
3/29/2010	8:56:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	8:57:16 AM	Bypass valve closed
3/29/2010	8:57:17 AM	Main Vac valve closed
3/29/2010	8:57:38 AM	Bypass valve opened
3/29/2010	8:57:38 AM	Main Vac valve opened
3/29/2010	8:57:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/29/2010	8:57:46 AM	Recipe started at 8:57 AM
3/29/2010	8:57:46 AM	H2 valve closed
3/29/2010	8:57:46 AM	BCl3 valve closed
3/29/2010	8:57:46 AM	PH3 valve closed
3/29/2010	8:57:46 AM	SiCl4 pre valve closed
3/29/2010	8:57:46 AM	SiCl4 post valve closed
3/29/2010	8:57:46 AM	Main Vac valve closed
3/29/2010	8:57:46 AM	Bypass valve closed
3/29/2010	8:57:46 AM	Bubbler valve closed
3/29/2010	8:57:46 AM	Helium valve opened
3/29/2010	8:57:46 AM	Helium MFC set to  500.000000
3/29/2010	8:57:46 AM	H2 MFC set to  0.000000
3/29/2010	8:57:46 AM	BCl3 MFC set to  0.000000
3/29/2010	8:57:46 AM	SiCl4 MFC set to  0.000000
3/29/2010	8:57:46 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	8:57:46 AM	Tube furnace set to 0
3/29/2010	8:59:09 AM	Helium valve closed
3/29/2010	8:59:09 AM	H2 valve closed
3/29/2010	8:59:09 AM	BCl3 valve closed
3/29/2010	8:59:09 AM	PH3 valve closed
3/29/2010	8:59:09 AM	SiCl4 pre valve closed
3/29/2010	8:59:09 AM	SiCl4 post valve closed
3/29/2010	8:59:09 AM	Main Vac valve closed
3/29/2010	8:59:09 AM	Bypass valve closed
3/29/2010	8:59:09 AM	Bubbler valve closed
3/29/2010	8:59:09 AM	Helium MFC set to  0.000000
3/29/2010	8:59:09 AM	H2 MFC set to  0.000000
3/29/2010	8:59:09 AM	BCl3 MFC set to  0.000000
3/29/2010	8:59:09 AM	SiCl4 MFC set to  0.000000
3/29/2010	8:59:09 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	8:59:09 AM	Tube furnace set to 0
3/29/2010	8:59:24 AM	Helium valve closed
3/29/2010	8:59:24 AM	H2 valve closed
3/29/2010	8:59:24 AM	BCl3 valve closed
3/29/2010	8:59:24 AM	PH3 valve closed
3/29/2010	8:59:24 AM	SiCl4 pre valve closed
3/29/2010	8:59:24 AM	SiCl4 post valve closed
3/29/2010	8:59:24 AM	Main Vac valve closed
3/29/2010	8:59:24 AM	Bubbler valve closed
3/29/2010	8:59:24 AM	Bypass valve opened
3/29/2010	8:59:24 AM	Helium MFC set to  0.000000
3/29/2010	8:59:24 AM	H2 MFC set to  0.000000
3/29/2010	8:59:24 AM	BCl3 MFC set to  0.000000
3/29/2010	8:59:24 AM	SiCl4 MFC set to  0.000000
3/29/2010	8:59:24 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	8:59:24 AM	Tube furnace set to 0
3/29/2010	8:59:47 AM	Helium valve closed
3/29/2010	8:59:47 AM	H2 valve closed
3/29/2010	8:59:47 AM	BCl3 valve closed
3/29/2010	8:59:47 AM	PH3 valve closed
3/29/2010	8:59:47 AM	SiCl4 pre valve closed
3/29/2010	8:59:47 AM	SiCl4 post valve closed
3/29/2010	8:59:47 AM	Bubbler valve closed
3/29/2010	8:59:47 AM	Main Vac valve opened
3/29/2010	8:59:47 AM	Bypass valve opened
3/29/2010	8:59:47 AM	Helium MFC set to  0.000000
3/29/2010	8:59:47 AM	H2 MFC set to  0.000000
3/29/2010	8:59:47 AM	BCl3 MFC set to  0.000000
3/29/2010	8:59:47 AM	SiCl4 MFC set to  0.000000
3/29/2010	8:59:47 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	8:59:47 AM	Tube furnace set to 0
3/29/2010	9:04:47 AM	H2 valve closed
3/29/2010	9:04:47 AM	BCl3 valve closed
3/29/2010	9:04:47 AM	PH3 valve closed
3/29/2010	9:04:47 AM	SiCl4 pre valve closed
3/29/2010	9:04:47 AM	SiCl4 post valve closed
3/29/2010	9:04:47 AM	Main Vac valve closed
3/29/2010	9:04:47 AM	Bypass valve closed
3/29/2010	9:04:47 AM	Bubbler valve closed
3/29/2010	9:04:47 AM	Helium valve opened
3/29/2010	9:04:47 AM	Helium MFC set to  500.000000
3/29/2010	9:04:47 AM	H2 MFC set to  0.000000
3/29/2010	9:04:47 AM	BCl3 MFC set to  0.000000
3/29/2010	9:04:47 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:04:47 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:04:47 AM	Tube furnace set to 0
3/29/2010	9:06:10 AM	Helium valve closed
3/29/2010	9:06:10 AM	H2 valve closed
3/29/2010	9:06:10 AM	BCl3 valve closed
3/29/2010	9:06:10 AM	PH3 valve closed
3/29/2010	9:06:10 AM	SiCl4 pre valve closed
3/29/2010	9:06:10 AM	SiCl4 post valve closed
3/29/2010	9:06:10 AM	Main Vac valve closed
3/29/2010	9:06:10 AM	Bypass valve closed
3/29/2010	9:06:10 AM	Bubbler valve closed
3/29/2010	9:06:10 AM	Helium MFC set to  0.000000
3/29/2010	9:06:10 AM	H2 MFC set to  0.000000
3/29/2010	9:06:10 AM	BCl3 MFC set to  0.000000
3/29/2010	9:06:10 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:06:10 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:06:10 AM	Tube furnace set to 0
3/29/2010	9:06:25 AM	Helium valve closed
3/29/2010	9:06:25 AM	H2 valve closed
3/29/2010	9:06:25 AM	BCl3 valve closed
3/29/2010	9:06:25 AM	PH3 valve closed
3/29/2010	9:06:25 AM	SiCl4 pre valve closed
3/29/2010	9:06:25 AM	SiCl4 post valve closed
3/29/2010	9:06:25 AM	Main Vac valve closed
3/29/2010	9:06:25 AM	Bubbler valve closed
3/29/2010	9:06:25 AM	Bypass valve opened
3/29/2010	9:06:25 AM	Helium MFC set to  0.000000
3/29/2010	9:06:25 AM	H2 MFC set to  0.000000
3/29/2010	9:06:25 AM	BCl3 MFC set to  0.000000
3/29/2010	9:06:25 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:06:25 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:06:25 AM	Tube furnace set to 0
3/29/2010	9:06:48 AM	Helium valve closed
3/29/2010	9:06:48 AM	H2 valve closed
3/29/2010	9:06:48 AM	BCl3 valve closed
3/29/2010	9:06:48 AM	PH3 valve closed
3/29/2010	9:06:48 AM	SiCl4 pre valve closed
3/29/2010	9:06:48 AM	SiCl4 post valve closed
3/29/2010	9:06:48 AM	Bubbler valve closed
3/29/2010	9:06:48 AM	Main Vac valve opened
3/29/2010	9:06:48 AM	Bypass valve opened
3/29/2010	9:06:48 AM	Helium MFC set to  0.000000
3/29/2010	9:06:48 AM	H2 MFC set to  0.000000
3/29/2010	9:06:48 AM	BCl3 MFC set to  0.000000
3/29/2010	9:06:48 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:06:48 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:06:48 AM	Tube furnace set to 0
3/29/2010	9:11:48 AM	H2 valve closed
3/29/2010	9:11:48 AM	BCl3 valve closed
3/29/2010	9:11:48 AM	PH3 valve closed
3/29/2010	9:11:48 AM	SiCl4 pre valve closed
3/29/2010	9:11:48 AM	SiCl4 post valve closed
3/29/2010	9:11:48 AM	Main Vac valve closed
3/29/2010	9:11:48 AM	Bypass valve closed
3/29/2010	9:11:48 AM	Bubbler valve closed
3/29/2010	9:11:48 AM	Helium valve opened
3/29/2010	9:11:48 AM	Helium MFC set to  500.000000
3/29/2010	9:11:48 AM	H2 MFC set to  0.000000
3/29/2010	9:11:48 AM	BCl3 MFC set to  0.000000
3/29/2010	9:11:48 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:11:48 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:11:48 AM	Tube furnace set to 0
3/29/2010	9:13:11 AM	Helium valve closed
3/29/2010	9:13:11 AM	H2 valve closed
3/29/2010	9:13:11 AM	BCl3 valve closed
3/29/2010	9:13:11 AM	PH3 valve closed
3/29/2010	9:13:11 AM	SiCl4 pre valve closed
3/29/2010	9:13:11 AM	SiCl4 post valve closed
3/29/2010	9:13:11 AM	Main Vac valve closed
3/29/2010	9:13:11 AM	Bypass valve closed
3/29/2010	9:13:11 AM	Bubbler valve closed
3/29/2010	9:13:11 AM	Helium MFC set to  0.000000
3/29/2010	9:13:11 AM	H2 MFC set to  0.000000
3/29/2010	9:13:11 AM	BCl3 MFC set to  0.000000
3/29/2010	9:13:11 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:13:11 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:13:11 AM	Tube furnace set to 0
3/29/2010	9:13:26 AM	Helium valve closed
3/29/2010	9:13:26 AM	H2 valve closed
3/29/2010	9:13:26 AM	BCl3 valve closed
3/29/2010	9:13:26 AM	PH3 valve closed
3/29/2010	9:13:26 AM	SiCl4 pre valve closed
3/29/2010	9:13:26 AM	SiCl4 post valve closed
3/29/2010	9:13:26 AM	Main Vac valve closed
3/29/2010	9:13:26 AM	Bubbler valve closed
3/29/2010	9:13:26 AM	Bypass valve opened
3/29/2010	9:13:26 AM	Helium MFC set to  0.000000
3/29/2010	9:13:26 AM	H2 MFC set to  0.000000
3/29/2010	9:13:26 AM	BCl3 MFC set to  0.000000
3/29/2010	9:13:26 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:13:26 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:13:26 AM	Tube furnace set to 0
3/29/2010	9:13:48 AM	Helium valve closed
3/29/2010	9:13:48 AM	H2 valve closed
3/29/2010	9:13:49 AM	BCl3 valve closed
3/29/2010	9:13:49 AM	PH3 valve closed
3/29/2010	9:13:49 AM	SiCl4 pre valve closed
3/29/2010	9:13:49 AM	SiCl4 post valve closed
3/29/2010	9:13:49 AM	Bubbler valve closed
3/29/2010	9:13:49 AM	Main Vac valve opened
3/29/2010	9:13:49 AM	Bypass valve opened
3/29/2010	9:13:49 AM	Helium MFC set to  0.000000
3/29/2010	9:13:49 AM	H2 MFC set to  0.000000
3/29/2010	9:13:49 AM	BCl3 MFC set to  0.000000
3/29/2010	9:13:49 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:13:49 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:13:49 AM	Tube furnace set to 0
3/29/2010	9:18:49 AM	Helium valve closed
3/29/2010	9:18:49 AM	H2 valve closed
3/29/2010	9:18:49 AM	BCl3 valve closed
3/29/2010	9:18:49 AM	PH3 valve closed
3/29/2010	9:18:49 AM	SiCl4 pre valve closed
3/29/2010	9:18:49 AM	SiCl4 post valve closed
3/29/2010	9:18:49 AM	Bubbler valve closed
3/29/2010	9:18:49 AM	Main Vac valve opened
3/29/2010	9:18:49 AM	Bypass valve opened
3/29/2010	9:18:49 AM	Helium MFC set to  0.000000
3/29/2010	9:18:49 AM	H2 MFC set to  0.000000
3/29/2010	9:18:49 AM	BCl3 MFC set to  0.000000
3/29/2010	9:18:49 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:18:49 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:18:49 AM	Tube furnace set to 0
3/29/2010	9:18:50 AM	Run finished at 9:18 AM
3/29/2010	9:18:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/29/2010	9:21:56 AM	Bypass valve closed
3/29/2010	9:21:57 AM	Main Vac valve closed
3/29/2010	9:23:09 AM	Bypass valve opened
3/29/2010	9:23:09 AM	Main Vac valve opened
3/29/2010	9:23:58 AM	Recipe started at 9:23 AM
3/29/2010	9:23:58 AM	Helium valve closed
3/29/2010	9:23:58 AM	BCl3 valve closed
3/29/2010	9:23:58 AM	PH3 valve closed
3/29/2010	9:23:58 AM	SiCl4 pre valve closed
3/29/2010	9:23:58 AM	SiCl4 post valve closed
3/29/2010	9:23:58 AM	Main Vac valve closed
3/29/2010	9:23:58 AM	Bypass valve closed
3/29/2010	9:23:58 AM	Bubbler valve closed
3/29/2010	9:23:58 AM	H2 valve opened
3/29/2010	9:23:58 AM	Helium MFC set to  0.000000
3/29/2010	9:23:58 AM	H2 MFC set to  500.000000
3/29/2010	9:23:58 AM	BCl3 MFC set to  0.000000
3/29/2010	9:23:58 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:23:58 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:23:58 AM	Tube furnace set to 0
3/29/2010	9:25:21 AM	Helium valve closed
3/29/2010	9:25:21 AM	BCl3 valve closed
3/29/2010	9:25:21 AM	PH3 valve closed
3/29/2010	9:25:21 AM	SiCl4 pre valve closed
3/29/2010	9:25:21 AM	SiCl4 post valve closed
3/29/2010	9:25:21 AM	Main Vac valve closed
3/29/2010	9:25:21 AM	Bypass valve closed
3/29/2010	9:25:21 AM	H2 valve opened
3/29/2010	9:25:21 AM	Bubbler valve opened
3/29/2010	9:25:21 AM	Helium MFC set to  0.000000
3/29/2010	9:25:21 AM	H2 MFC set to  500.000000
3/29/2010	9:25:21 AM	BCl3 MFC set to  0.000000
3/29/2010	9:25:21 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:25:21 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:25:21 AM	Tube furnace set to 0
3/29/2010	9:26:22 AM	Run aborted at 9:26 AM
3/29/2010	9:26:22 AM	Helium valve closed
3/29/2010	9:26:22 AM	H2 valve closed
3/29/2010	9:26:22 AM	BCl3 valve closed
3/29/2010	9:26:22 AM	PH3 valve closed
3/29/2010	9:26:22 AM	SiCl4 pre valve closed
3/29/2010	9:26:22 AM	SiCl4 post valve closed
3/29/2010	9:26:22 AM	Bypass valve closed
3/29/2010	9:26:22 AM	Main Vac valve closed
3/29/2010	9:26:22 AM	Bubbler valve closed
3/29/2010	9:26:22 AM	Helium MFC set to  0.000000
3/29/2010	9:26:22 AM	H2 MFC set to  0.000000
3/29/2010	9:26:22 AM	BCl3 MFC set to  0.000000
3/29/2010	9:26:22 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:26:22 AM	Tube furnace set to 0
3/29/2010	9:28:08 AM	Recipe started at 9:28 AM
3/29/2010	9:28:08 AM	Helium valve closed
3/29/2010	9:28:08 AM	BCl3 valve closed
3/29/2010	9:28:09 AM	PH3 valve closed
3/29/2010	9:28:09 AM	SiCl4 pre valve closed
3/29/2010	9:28:09 AM	SiCl4 post valve closed
3/29/2010	9:28:09 AM	Main Vac valve closed
3/29/2010	9:28:09 AM	Bypass valve closed
3/29/2010	9:28:09 AM	Bubbler valve closed
3/29/2010	9:28:09 AM	H2 valve opened
3/29/2010	9:28:09 AM	Helium MFC set to  0.000000
3/29/2010	9:28:09 AM	H2 MFC set to  500.000000
3/29/2010	9:28:09 AM	BCl3 MFC set to  0.000000
3/29/2010	9:28:09 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:28:09 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:28:09 AM	Tube furnace set to 0
3/29/2010	9:28:09 AM	Helium valve closed
3/29/2010	9:28:09 AM	BCl3 valve closed
3/29/2010	9:28:09 AM	PH3 valve closed
3/29/2010	9:28:09 AM	SiCl4 pre valve closed
3/29/2010	9:28:09 AM	SiCl4 post valve closed
3/29/2010	9:28:09 AM	Main Vac valve closed
3/29/2010	9:28:09 AM	Bypass valve closed
3/29/2010	9:28:09 AM	H2 valve opened
3/29/2010	9:28:09 AM	Bubbler valve opened
3/29/2010	9:28:09 AM	Helium MFC set to  0.000000
3/29/2010	9:28:09 AM	H2 MFC set to  500.000000
3/29/2010	9:28:09 AM	BCl3 MFC set to  0.000000
3/29/2010	9:28:09 AM	SiCl4 MFC set to  0.000000
3/29/2010	9:28:09 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:28:09 AM	Tube furnace set to 1000
3/29/2010	9:48:09 AM	Helium valve closed
3/29/2010	9:48:09 AM	PH3 valve closed
3/29/2010	9:48:09 AM	Main Vac valve closed
3/29/2010	9:48:09 AM	Bypass valve closed
3/29/2010	9:48:09 AM	H2 valve opened
3/29/2010	9:48:09 AM	BCl3 valve opened
3/29/2010	9:48:09 AM	SiCl4 pre valve opened
3/29/2010	9:48:09 AM	SiCl4 post valve opened
3/29/2010	9:48:09 AM	Bubbler valve opened
3/29/2010	9:48:09 AM	Helium MFC set to  0.000000
3/29/2010	9:48:09 AM	H2 MFC set to  500.000000
3/29/2010	9:48:09 AM	BCl3 MFC set to  35.000000
3/29/2010	9:48:09 AM	SiCl4 MFC set to  400.000000
3/29/2010	9:48:09 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	9:48:09 AM	Tube furnace set to 1000
3/29/2010	10:08:09 AM	H2 valve closed
3/29/2010	10:08:09 AM	BCl3 valve closed
3/29/2010	10:08:09 AM	PH3 valve closed
3/29/2010	10:08:09 AM	SiCl4 pre valve closed
3/29/2010	10:08:09 AM	SiCl4 post valve closed
3/29/2010	10:08:09 AM	Main Vac valve closed
3/29/2010	10:08:09 AM	Bypass valve closed
3/29/2010	10:08:09 AM	Helium valve opened
3/29/2010	10:08:09 AM	Bubbler valve opened
3/29/2010	10:08:09 AM	Helium MFC set to  500.000000
3/29/2010	10:08:09 AM	H2 MFC set to  0.000000
3/29/2010	10:08:09 AM	BCl3 MFC set to  0.000000
3/29/2010	10:08:09 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:08:09 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:08:09 AM	Tube furnace set to 0
3/29/2010	10:28:09 AM	Helium valve closed
3/29/2010	10:28:09 AM	H2 valve closed
3/29/2010	10:28:09 AM	BCl3 valve closed
3/29/2010	10:28:09 AM	PH3 valve closed
3/29/2010	10:28:09 AM	SiCl4 pre valve closed
3/29/2010	10:28:09 AM	SiCl4 post valve closed
3/29/2010	10:28:09 AM	Main Vac valve closed
3/29/2010	10:28:09 AM	Bypass valve closed
3/29/2010	10:28:09 AM	Bubbler valve closed
3/29/2010	10:28:09 AM	Helium MFC set to  0.000000
3/29/2010	10:28:09 AM	H2 MFC set to  0.000000
3/29/2010	10:28:09 AM	BCl3 MFC set to  0.000000
3/29/2010	10:28:09 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:28:09 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:28:10 AM	Tube furnace set to 0
3/29/2010	10:28:10 AM	Run finished at 10:28 AM
3/29/2010	10:37:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	10:37:27 AM	Recipe started at 10:37 AM
3/29/2010	10:37:27 AM	Helium valve closed
3/29/2010	10:37:27 AM	H2 valve closed
3/29/2010	10:37:27 AM	BCl3 valve closed
3/29/2010	10:37:27 AM	PH3 valve closed
3/29/2010	10:37:27 AM	SiCl4 pre valve closed
3/29/2010	10:37:27 AM	SiCl4 post valve closed
3/29/2010	10:37:27 AM	Main Vac valve closed
3/29/2010	10:37:27 AM	Bubbler valve closed
3/29/2010	10:37:27 AM	Bypass valve opened
3/29/2010	10:37:27 AM	Helium MFC set to  0.000000
3/29/2010	10:37:27 AM	H2 MFC set to  0.000000
3/29/2010	10:37:27 AM	BCl3 MFC set to  0.000000
3/29/2010	10:37:27 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:37:27 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:37:27 AM	Tube furnace set to 0
3/29/2010	10:37:58 AM	Helium valve closed
3/29/2010	10:37:58 AM	H2 valve closed
3/29/2010	10:37:58 AM	BCl3 valve closed
3/29/2010	10:37:59 AM	PH3 valve closed
3/29/2010	10:37:59 AM	SiCl4 pre valve closed
3/29/2010	10:37:59 AM	SiCl4 post valve closed
3/29/2010	10:37:59 AM	Bubbler valve closed
3/29/2010	10:37:59 AM	Main Vac valve opened
3/29/2010	10:37:59 AM	Bypass valve opened
3/29/2010	10:37:59 AM	Helium MFC set to  0.000000
3/29/2010	10:37:59 AM	H2 MFC set to  0.000000
3/29/2010	10:37:59 AM	BCl3 MFC set to  0.000000
3/29/2010	10:37:59 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:37:59 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:37:59 AM	Tube furnace set to 0
3/29/2010	10:37:59 AM	Run finished at 10:37 AM
3/29/2010	10:37:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	10:40:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	10:40:16 AM	Recipe started at 10:40 AM
3/29/2010	10:40:16 AM	H2 valve closed
3/29/2010	10:40:16 AM	BCl3 valve closed
3/29/2010	10:40:16 AM	PH3 valve closed
3/29/2010	10:40:16 AM	SiCl4 pre valve closed
3/29/2010	10:40:16 AM	SiCl4 post valve closed
3/29/2010	10:40:16 AM	Main Vac valve closed
3/29/2010	10:40:16 AM	Bypass valve closed
3/29/2010	10:40:16 AM	Bubbler valve closed
3/29/2010	10:40:16 AM	Helium valve opened
3/29/2010	10:40:16 AM	Helium MFC set to  500.000000
3/29/2010	10:40:16 AM	H2 MFC set to  0.000000
3/29/2010	10:40:16 AM	BCl3 MFC set to  0.000000
3/29/2010	10:40:16 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:40:16 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:40:16 AM	Tube furnace set to 0
3/29/2010	10:41:34 AM	Helium valve closed
3/29/2010	10:41:34 AM	H2 valve closed
3/29/2010	10:41:34 AM	BCl3 valve closed
3/29/2010	10:41:34 AM	PH3 valve closed
3/29/2010	10:41:34 AM	SiCl4 pre valve closed
3/29/2010	10:41:34 AM	SiCl4 post valve closed
3/29/2010	10:41:34 AM	Main Vac valve closed
3/29/2010	10:41:34 AM	Bypass valve closed
3/29/2010	10:41:34 AM	Bubbler valve closed
3/29/2010	10:41:34 AM	Helium MFC set to  0.000000
3/29/2010	10:41:34 AM	H2 MFC set to  0.000000
3/29/2010	10:41:34 AM	BCl3 MFC set to  0.000000
3/29/2010	10:41:34 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:41:34 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:41:34 AM	Tube furnace set to 0
3/29/2010	10:41:35 AM	Run finished at 10:41 AM
3/29/2010	10:41:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	10:41:53 AM	H2 MFC set to  200.000000
3/29/2010	10:41:56 AM	H2 valve opened
3/29/2010	10:42:03 AM	Bubbler valve opened
3/29/2010	10:42:14 AM	SiCl4 MFC set to  300.000000
3/29/2010	10:42:21 AM	SiCl4 pre valve opened
3/29/2010	10:42:21 AM	SiCl4 post valve opened
3/29/2010	10:43:53 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:43:54 AM	SiCl4 post valve closed
3/29/2010	10:43:55 AM	SiCl4 pre valve closed
3/29/2010	10:45:06 AM	SiCl4 MFC set to  300.000000
3/29/2010	10:45:32 AM	SiCl4 pre valve opened
3/29/2010	10:45:33 AM	SiCl4 post valve opened
3/29/2010	10:45:38 AM	SiCl4 post valve closed
3/29/2010	10:45:39 AM	SiCl4 pre valve closed
3/29/2010	10:46:14 AM	Helium MFC set to  500.000000
3/29/2010	10:46:19 AM	Helium valve opened
3/29/2010	10:46:21 AM	H2 valve closed
3/29/2010	10:47:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/29/2010	10:47:08 AM	Recipe started at 10:47 AM
3/29/2010	10:47:08 AM	Helium valve closed
3/29/2010	10:47:08 AM	H2 valve closed
3/29/2010	10:47:08 AM	BCl3 valve closed
3/29/2010	10:47:08 AM	PH3 valve closed
3/29/2010	10:47:08 AM	SiCl4 pre valve closed
3/29/2010	10:47:08 AM	SiCl4 post valve closed
3/29/2010	10:47:08 AM	Main Vac valve closed
3/29/2010	10:47:08 AM	Bypass valve closed
3/29/2010	10:47:08 AM	Bubbler valve closed
3/29/2010	10:47:08 AM	Helium MFC set to  0.000000
3/29/2010	10:47:08 AM	H2 MFC set to  0.000000
3/29/2010	10:47:08 AM	BCl3 MFC set to  0.000000
3/29/2010	10:47:08 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:47:08 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:47:08 AM	Tube furnace set to 0
3/29/2010	10:47:08 AM	Run finished at 10:47 AM
3/29/2010	10:47:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/29/2010	10:47:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	10:47:12 AM	Recipe started at 10:47 AM
3/29/2010	10:47:12 AM	Helium valve closed
3/29/2010	10:47:12 AM	H2 valve closed
3/29/2010	10:47:12 AM	BCl3 valve closed
3/29/2010	10:47:12 AM	PH3 valve closed
3/29/2010	10:47:12 AM	SiCl4 pre valve closed
3/29/2010	10:47:12 AM	SiCl4 post valve closed
3/29/2010	10:47:12 AM	Main Vac valve closed
3/29/2010	10:47:12 AM	Bubbler valve closed
3/29/2010	10:47:12 AM	Bypass valve opened
3/29/2010	10:47:12 AM	Helium MFC set to  0.000000
3/29/2010	10:47:12 AM	H2 MFC set to  0.000000
3/29/2010	10:47:12 AM	BCl3 MFC set to  0.000000
3/29/2010	10:47:12 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:47:12 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:47:12 AM	Tube furnace set to 0
3/29/2010	10:47:32 AM	Helium valve closed
3/29/2010	10:47:32 AM	H2 valve closed
3/29/2010	10:47:32 AM	BCl3 valve closed
3/29/2010	10:47:32 AM	PH3 valve closed
3/29/2010	10:47:32 AM	SiCl4 pre valve closed
3/29/2010	10:47:32 AM	SiCl4 post valve closed
3/29/2010	10:47:32 AM	Bubbler valve closed
3/29/2010	10:47:32 AM	Main Vac valve opened
3/29/2010	10:47:32 AM	Bypass valve opened
3/29/2010	10:47:32 AM	Helium MFC set to  0.000000
3/29/2010	10:47:32 AM	H2 MFC set to  0.000000
3/29/2010	10:47:32 AM	BCl3 MFC set to  0.000000
3/29/2010	10:47:32 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:47:32 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:47:33 AM	Tube furnace set to 0
3/29/2010	10:47:33 AM	Run finished at 10:47 AM
3/29/2010	10:47:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	10:47:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	10:47:53 AM	Recipe started at 10:47 AM
3/29/2010	10:47:53 AM	H2 valve closed
3/29/2010	10:47:53 AM	BCl3 valve closed
3/29/2010	10:47:53 AM	PH3 valve closed
3/29/2010	10:47:53 AM	SiCl4 pre valve closed
3/29/2010	10:47:53 AM	SiCl4 post valve closed
3/29/2010	10:47:53 AM	Main Vac valve closed
3/29/2010	10:47:53 AM	Bypass valve closed
3/29/2010	10:47:53 AM	Bubbler valve closed
3/29/2010	10:47:53 AM	Helium valve opened
3/29/2010	10:47:53 AM	Helium MFC set to  500.000000
3/29/2010	10:47:53 AM	H2 MFC set to  0.000000
3/29/2010	10:47:53 AM	BCl3 MFC set to  0.000000
3/29/2010	10:47:53 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:47:53 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:47:53 AM	Tube furnace set to 0
3/29/2010	10:49:10 AM	Helium valve closed
3/29/2010	10:49:10 AM	H2 valve closed
3/29/2010	10:49:10 AM	BCl3 valve closed
3/29/2010	10:49:10 AM	PH3 valve closed
3/29/2010	10:49:10 AM	SiCl4 pre valve closed
3/29/2010	10:49:10 AM	SiCl4 post valve closed
3/29/2010	10:49:10 AM	Main Vac valve closed
3/29/2010	10:49:10 AM	Bypass valve closed
3/29/2010	10:49:10 AM	Bubbler valve closed
3/29/2010	10:49:10 AM	Helium MFC set to  0.000000
3/29/2010	10:49:10 AM	H2 MFC set to  0.000000
3/29/2010	10:49:10 AM	BCl3 MFC set to  0.000000
3/29/2010	10:49:10 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:49:10 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:49:10 AM	Tube furnace set to 0
3/29/2010	10:49:10 AM	Run finished at 10:49 AM
3/29/2010	10:49:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	10:49:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	10:49:15 AM	Recipe started at 10:49 AM
3/29/2010	10:49:15 AM	Helium valve closed
3/29/2010	10:49:15 AM	H2 valve closed
3/29/2010	10:49:15 AM	BCl3 valve closed
3/29/2010	10:49:15 AM	PH3 valve closed
3/29/2010	10:49:15 AM	SiCl4 pre valve closed
3/29/2010	10:49:15 AM	SiCl4 post valve closed
3/29/2010	10:49:15 AM	Main Vac valve closed
3/29/2010	10:49:15 AM	Bubbler valve closed
3/29/2010	10:49:15 AM	Bypass valve opened
3/29/2010	10:49:15 AM	Helium MFC set to  0.000000
3/29/2010	10:49:15 AM	H2 MFC set to  0.000000
3/29/2010	10:49:15 AM	BCl3 MFC set to  0.000000
3/29/2010	10:49:15 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:49:15 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:49:15 AM	Tube furnace set to 0
3/29/2010	10:49:36 AM	Helium valve closed
3/29/2010	10:49:36 AM	H2 valve closed
3/29/2010	10:49:36 AM	BCl3 valve closed
3/29/2010	10:49:36 AM	PH3 valve closed
3/29/2010	10:49:36 AM	SiCl4 pre valve closed
3/29/2010	10:49:36 AM	SiCl4 post valve closed
3/29/2010	10:49:36 AM	Bubbler valve closed
3/29/2010	10:49:36 AM	Main Vac valve opened
3/29/2010	10:49:36 AM	Bypass valve opened
3/29/2010	10:49:36 AM	Helium MFC set to  0.000000
3/29/2010	10:49:36 AM	H2 MFC set to  0.000000
3/29/2010	10:49:36 AM	BCl3 MFC set to  0.000000
3/29/2010	10:49:36 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:49:36 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:49:36 AM	Tube furnace set to 0
3/29/2010	10:49:37 AM	Run finished at 10:49 AM
3/29/2010	10:49:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	10:53:24 AM	Bypass valve closed
3/29/2010	10:53:24 AM	Main Vac valve closed
3/29/2010	10:53:54 AM	Bypass valve opened
3/29/2010	10:53:55 AM	Main Vac valve opened
3/29/2010	10:57:17 AM	Recipe started at 10:57 AM
3/29/2010	10:57:17 AM	Helium valve closed
3/29/2010	10:57:17 AM	BCl3 valve closed
3/29/2010	10:57:17 AM	PH3 valve closed
3/29/2010	10:57:17 AM	SiCl4 pre valve closed
3/29/2010	10:57:17 AM	SiCl4 post valve closed
3/29/2010	10:57:17 AM	Main Vac valve closed
3/29/2010	10:57:17 AM	Bypass valve closed
3/29/2010	10:57:17 AM	Bubbler valve closed
3/29/2010	10:57:17 AM	H2 valve opened
3/29/2010	10:57:17 AM	Helium MFC set to  0.000000
3/29/2010	10:57:17 AM	H2 MFC set to  500.000000
3/29/2010	10:57:17 AM	BCl3 MFC set to  0.000000
3/29/2010	10:57:17 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:57:17 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:57:17 AM	Tube furnace set to 0
3/29/2010	10:58:36 AM	Helium valve closed
3/29/2010	10:58:36 AM	BCl3 valve closed
3/29/2010	10:58:36 AM	PH3 valve closed
3/29/2010	10:58:36 AM	SiCl4 pre valve closed
3/29/2010	10:58:36 AM	SiCl4 post valve closed
3/29/2010	10:58:36 AM	Main Vac valve closed
3/29/2010	10:58:36 AM	Bypass valve closed
3/29/2010	10:58:36 AM	H2 valve opened
3/29/2010	10:58:36 AM	Bubbler valve opened
3/29/2010	10:58:36 AM	Helium MFC set to  0.000000
3/29/2010	10:58:36 AM	H2 MFC set to  500.000000
3/29/2010	10:58:36 AM	BCl3 MFC set to  0.000000
3/29/2010	10:58:36 AM	SiCl4 MFC set to  0.000000
3/29/2010	10:58:36 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	10:58:37 AM	Tube furnace set to 1000
3/29/2010	11:18:37 AM	Helium valve closed
3/29/2010	11:18:37 AM	PH3 valve closed
3/29/2010	11:18:37 AM	Main Vac valve closed
3/29/2010	11:18:37 AM	Bypass valve closed
3/29/2010	11:18:37 AM	H2 valve opened
3/29/2010	11:18:37 AM	BCl3 valve opened
3/29/2010	11:18:37 AM	SiCl4 pre valve opened
3/29/2010	11:18:37 AM	SiCl4 post valve opened
3/29/2010	11:18:37 AM	Bubbler valve opened
3/29/2010	11:18:37 AM	Helium MFC set to  0.000000
3/29/2010	11:18:37 AM	H2 MFC set to  500.000000
3/29/2010	11:18:37 AM	BCl3 MFC set to  35.000000
3/29/2010	11:18:37 AM	SiCl4 MFC set to  400.000000
3/29/2010	11:18:37 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	11:18:37 AM	Tube furnace set to 1000
3/29/2010	11:38:37 AM	H2 valve closed
3/29/2010	11:38:37 AM	BCl3 valve closed
3/29/2010	11:38:37 AM	PH3 valve closed
3/29/2010	11:38:37 AM	SiCl4 pre valve closed
3/29/2010	11:38:37 AM	SiCl4 post valve closed
3/29/2010	11:38:37 AM	Main Vac valve closed
3/29/2010	11:38:37 AM	Bypass valve closed
3/29/2010	11:38:37 AM	Helium valve opened
3/29/2010	11:38:37 AM	Bubbler valve opened
3/29/2010	11:38:37 AM	Helium MFC set to  500.000000
3/29/2010	11:38:37 AM	H2 MFC set to  0.000000
3/29/2010	11:38:37 AM	BCl3 MFC set to  0.000000
3/29/2010	11:38:37 AM	SiCl4 MFC set to  0.000000
3/29/2010	11:38:37 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	11:38:37 AM	Tube furnace set to 0
3/29/2010	11:58:37 AM	Helium valve closed
3/29/2010	11:58:37 AM	H2 valve closed
3/29/2010	11:58:37 AM	BCl3 valve closed
3/29/2010	11:58:37 AM	PH3 valve closed
3/29/2010	11:58:37 AM	SiCl4 pre valve closed
3/29/2010	11:58:37 AM	SiCl4 post valve closed
3/29/2010	11:58:37 AM	Main Vac valve closed
3/29/2010	11:58:37 AM	Bypass valve closed
3/29/2010	11:58:37 AM	Bubbler valve closed
3/29/2010	11:58:37 AM	Helium MFC set to  0.000000
3/29/2010	11:58:37 AM	H2 MFC set to  0.000000
3/29/2010	11:58:37 AM	BCl3 MFC set to  0.000000
3/29/2010	11:58:37 AM	SiCl4 MFC set to  0.000000
3/29/2010	11:58:37 AM	Bypass solenoid MFC set to  0.000000
3/29/2010	11:58:37 AM	Tube furnace set to 0
3/29/2010	11:58:37 AM	Run finished at 11:58 AM
3/29/2010	12:02:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	12:02:28 PM	Recipe started at 12:02 PM
3/29/2010	12:02:28 PM	Helium valve closed
3/29/2010	12:02:28 PM	H2 valve closed
3/29/2010	12:02:28 PM	BCl3 valve closed
3/29/2010	12:02:28 PM	PH3 valve closed
3/29/2010	12:02:28 PM	SiCl4 pre valve closed
3/29/2010	12:02:28 PM	SiCl4 post valve closed
3/29/2010	12:02:28 PM	Main Vac valve closed
3/29/2010	12:02:28 PM	Bubbler valve closed
3/29/2010	12:02:28 PM	Bypass valve opened
3/29/2010	12:02:28 PM	Helium MFC set to  0.000000
3/29/2010	12:02:28 PM	H2 MFC set to  0.000000
3/29/2010	12:02:28 PM	BCl3 MFC set to  0.000000
3/29/2010	12:02:28 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:02:28 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:02:28 PM	Tube furnace set to 0
3/29/2010	12:02:59 PM	Helium valve closed
3/29/2010	12:02:59 PM	H2 valve closed
3/29/2010	12:02:59 PM	BCl3 valve closed
3/29/2010	12:02:59 PM	PH3 valve closed
3/29/2010	12:02:59 PM	SiCl4 pre valve closed
3/29/2010	12:02:59 PM	SiCl4 post valve closed
3/29/2010	12:02:59 PM	Bubbler valve closed
3/29/2010	12:02:59 PM	Main Vac valve opened
3/29/2010	12:02:59 PM	Bypass valve opened
3/29/2010	12:02:59 PM	Helium MFC set to  0.000000
3/29/2010	12:02:59 PM	H2 MFC set to  0.000000
3/29/2010	12:02:59 PM	BCl3 MFC set to  0.000000
3/29/2010	12:02:59 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:02:59 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:02:59 PM	Tube furnace set to 0
3/29/2010	12:02:59 PM	Run finished at 12:02 PM
3/29/2010	12:02:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	12:03:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	12:03:07 PM	Recipe started at 12:03 PM
3/29/2010	12:03:07 PM	H2 valve closed
3/29/2010	12:03:07 PM	BCl3 valve closed
3/29/2010	12:03:07 PM	PH3 valve closed
3/29/2010	12:03:07 PM	SiCl4 pre valve closed
3/29/2010	12:03:07 PM	SiCl4 post valve closed
3/29/2010	12:03:07 PM	Main Vac valve closed
3/29/2010	12:03:07 PM	Bypass valve closed
3/29/2010	12:03:07 PM	Bubbler valve closed
3/29/2010	12:03:07 PM	Helium valve opened
3/29/2010	12:03:07 PM	Helium MFC set to  500.000000
3/29/2010	12:03:07 PM	H2 MFC set to  0.000000
3/29/2010	12:03:07 PM	BCl3 MFC set to  0.000000
3/29/2010	12:03:07 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:03:07 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:03:07 PM	Tube furnace set to 0
3/29/2010	12:04:25 PM	Helium valve closed
3/29/2010	12:04:25 PM	H2 valve closed
3/29/2010	12:04:25 PM	BCl3 valve closed
3/29/2010	12:04:25 PM	PH3 valve closed
3/29/2010	12:04:25 PM	SiCl4 pre valve closed
3/29/2010	12:04:25 PM	SiCl4 post valve closed
3/29/2010	12:04:25 PM	Main Vac valve closed
3/29/2010	12:04:25 PM	Bypass valve closed
3/29/2010	12:04:25 PM	Bubbler valve closed
3/29/2010	12:04:25 PM	Helium MFC set to  0.000000
3/29/2010	12:04:25 PM	H2 MFC set to  0.000000
3/29/2010	12:04:25 PM	BCl3 MFC set to  0.000000
3/29/2010	12:04:25 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:04:25 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:04:25 PM	Tube furnace set to 0
3/29/2010	12:04:25 PM	Run finished at 12:04 PM
3/29/2010	12:04:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	12:04:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	12:04:29 PM	Recipe started at 12:04 PM
3/29/2010	12:04:29 PM	Helium valve closed
3/29/2010	12:04:29 PM	H2 valve closed
3/29/2010	12:04:29 PM	BCl3 valve closed
3/29/2010	12:04:29 PM	PH3 valve closed
3/29/2010	12:04:29 PM	SiCl4 pre valve closed
3/29/2010	12:04:29 PM	SiCl4 post valve closed
3/29/2010	12:04:29 PM	Main Vac valve closed
3/29/2010	12:04:29 PM	Bubbler valve closed
3/29/2010	12:04:29 PM	Bypass valve opened
3/29/2010	12:04:29 PM	Helium MFC set to  0.000000
3/29/2010	12:04:29 PM	H2 MFC set to  0.000000
3/29/2010	12:04:29 PM	BCl3 MFC set to  0.000000
3/29/2010	12:04:29 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:04:29 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:04:30 PM	Tube furnace set to 0
3/29/2010	12:04:51 PM	Helium valve closed
3/29/2010	12:04:51 PM	H2 valve closed
3/29/2010	12:04:51 PM	BCl3 valve closed
3/29/2010	12:04:51 PM	PH3 valve closed
3/29/2010	12:04:51 PM	SiCl4 pre valve closed
3/29/2010	12:04:51 PM	SiCl4 post valve closed
3/29/2010	12:04:51 PM	Bubbler valve closed
3/29/2010	12:04:51 PM	Main Vac valve opened
3/29/2010	12:04:51 PM	Bypass valve opened
3/29/2010	12:04:51 PM	Helium MFC set to  0.000000
3/29/2010	12:04:51 PM	H2 MFC set to  0.000000
3/29/2010	12:04:51 PM	BCl3 MFC set to  0.000000
3/29/2010	12:04:51 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:04:51 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:04:51 PM	Tube furnace set to 0
3/29/2010	12:04:51 PM	Run finished at 12:04 PM
3/29/2010	12:04:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	12:07:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	12:07:21 PM	Recipe started at 12:07 PM
3/29/2010	12:07:21 PM	H2 valve closed
3/29/2010	12:07:21 PM	BCl3 valve closed
3/29/2010	12:07:21 PM	PH3 valve closed
3/29/2010	12:07:21 PM	SiCl4 pre valve closed
3/29/2010	12:07:21 PM	SiCl4 post valve closed
3/29/2010	12:07:21 PM	Main Vac valve closed
3/29/2010	12:07:21 PM	Bypass valve closed
3/29/2010	12:07:21 PM	Bubbler valve closed
3/29/2010	12:07:21 PM	Helium valve opened
3/29/2010	12:07:21 PM	Helium MFC set to  500.000000
3/29/2010	12:07:21 PM	H2 MFC set to  0.000000
3/29/2010	12:07:21 PM	BCl3 MFC set to  0.000000
3/29/2010	12:07:21 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:07:21 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:07:21 PM	Tube furnace set to 0
3/29/2010	12:08:38 PM	Helium valve closed
3/29/2010	12:08:38 PM	H2 valve closed
3/29/2010	12:08:38 PM	BCl3 valve closed
3/29/2010	12:08:38 PM	PH3 valve closed
3/29/2010	12:08:38 PM	SiCl4 pre valve closed
3/29/2010	12:08:38 PM	SiCl4 post valve closed
3/29/2010	12:08:38 PM	Main Vac valve closed
3/29/2010	12:08:38 PM	Bypass valve closed
3/29/2010	12:08:38 PM	Bubbler valve closed
3/29/2010	12:08:38 PM	Helium MFC set to  0.000000
3/29/2010	12:08:38 PM	H2 MFC set to  0.000000
3/29/2010	12:08:38 PM	BCl3 MFC set to  0.000000
3/29/2010	12:08:38 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:08:38 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:08:38 PM	Tube furnace set to 0
3/29/2010	12:08:38 PM	Run finished at 12:08 PM
3/29/2010	12:08:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	12:08:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	12:08:41 PM	Recipe started at 12:08 PM
3/29/2010	12:08:41 PM	Helium valve closed
3/29/2010	12:08:41 PM	H2 valve closed
3/29/2010	12:08:41 PM	BCl3 valve closed
3/29/2010	12:08:41 PM	PH3 valve closed
3/29/2010	12:08:41 PM	SiCl4 pre valve closed
3/29/2010	12:08:41 PM	SiCl4 post valve closed
3/29/2010	12:08:41 PM	Main Vac valve closed
3/29/2010	12:08:41 PM	Bubbler valve closed
3/29/2010	12:08:41 PM	Bypass valve opened
3/29/2010	12:08:41 PM	Helium MFC set to  0.000000
3/29/2010	12:08:41 PM	H2 MFC set to  0.000000
3/29/2010	12:08:41 PM	BCl3 MFC set to  0.000000
3/29/2010	12:08:41 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:08:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:08:42 PM	Tube furnace set to 0
3/29/2010	12:09:03 PM	Helium valve closed
3/29/2010	12:09:03 PM	H2 valve closed
3/29/2010	12:09:03 PM	BCl3 valve closed
3/29/2010	12:09:03 PM	PH3 valve closed
3/29/2010	12:09:03 PM	SiCl4 pre valve closed
3/29/2010	12:09:03 PM	SiCl4 post valve closed
3/29/2010	12:09:03 PM	Bubbler valve closed
3/29/2010	12:09:03 PM	Main Vac valve opened
3/29/2010	12:09:03 PM	Bypass valve opened
3/29/2010	12:09:03 PM	Helium MFC set to  0.000000
3/29/2010	12:09:03 PM	H2 MFC set to  0.000000
3/29/2010	12:09:03 PM	BCl3 MFC set to  0.000000
3/29/2010	12:09:03 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:09:03 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:09:03 PM	Tube furnace set to 0
3/29/2010	12:09:03 PM	Run finished at 12:09 PM
3/29/2010	12:09:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	12:16:39 PM	Bypass valve closed
3/29/2010	12:16:40 PM	Main Vac valve closed
3/29/2010	12:17:00 PM	Bypass valve opened
3/29/2010	12:17:00 PM	Main Vac valve opened
3/29/2010	12:17:21 PM	Recipe started at 12:17 PM
3/29/2010	12:17:21 PM	Helium valve closed
3/29/2010	12:17:21 PM	BCl3 valve closed
3/29/2010	12:17:21 PM	PH3 valve closed
3/29/2010	12:17:21 PM	SiCl4 pre valve closed
3/29/2010	12:17:21 PM	SiCl4 post valve closed
3/29/2010	12:17:21 PM	Main Vac valve closed
3/29/2010	12:17:21 PM	Bypass valve closed
3/29/2010	12:17:21 PM	Bubbler valve closed
3/29/2010	12:17:21 PM	H2 valve opened
3/29/2010	12:17:21 PM	Helium MFC set to  0.000000
3/29/2010	12:17:21 PM	H2 MFC set to  500.000000
3/29/2010	12:17:21 PM	BCl3 MFC set to  0.000000
3/29/2010	12:17:21 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:17:21 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:17:21 PM	Tube furnace set to 0
3/29/2010	12:18:40 PM	Helium valve closed
3/29/2010	12:18:40 PM	BCl3 valve closed
3/29/2010	12:18:40 PM	PH3 valve closed
3/29/2010	12:18:40 PM	SiCl4 pre valve closed
3/29/2010	12:18:40 PM	SiCl4 post valve closed
3/29/2010	12:18:40 PM	Main Vac valve closed
3/29/2010	12:18:40 PM	Bypass valve closed
3/29/2010	12:18:40 PM	H2 valve opened
3/29/2010	12:18:40 PM	Bubbler valve opened
3/29/2010	12:18:40 PM	Helium MFC set to  0.000000
3/29/2010	12:18:40 PM	H2 MFC set to  500.000000
3/29/2010	12:18:40 PM	BCl3 MFC set to  0.000000
3/29/2010	12:18:40 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:18:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:18:40 PM	Tube furnace set to 1000
3/29/2010	12:38:40 PM	Helium valve closed
3/29/2010	12:38:40 PM	PH3 valve closed
3/29/2010	12:38:40 PM	Main Vac valve closed
3/29/2010	12:38:40 PM	Bypass valve closed
3/29/2010	12:38:40 PM	H2 valve opened
3/29/2010	12:38:40 PM	BCl3 valve opened
3/29/2010	12:38:40 PM	SiCl4 pre valve opened
3/29/2010	12:38:40 PM	SiCl4 post valve opened
3/29/2010	12:38:40 PM	Bubbler valve opened
3/29/2010	12:38:40 PM	Helium MFC set to  0.000000
3/29/2010	12:38:40 PM	H2 MFC set to  500.000000
3/29/2010	12:38:40 PM	BCl3 MFC set to  35.000000
3/29/2010	12:38:40 PM	SiCl4 MFC set to  400.000000
3/29/2010	12:38:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:38:40 PM	Tube furnace set to 1000
3/29/2010	12:58:40 PM	H2 valve closed
3/29/2010	12:58:40 PM	BCl3 valve closed
3/29/2010	12:58:40 PM	PH3 valve closed
3/29/2010	12:58:40 PM	SiCl4 pre valve closed
3/29/2010	12:58:40 PM	SiCl4 post valve closed
3/29/2010	12:58:40 PM	Main Vac valve closed
3/29/2010	12:58:40 PM	Bypass valve closed
3/29/2010	12:58:40 PM	Helium valve opened
3/29/2010	12:58:40 PM	Bubbler valve opened
3/29/2010	12:58:40 PM	Helium MFC set to  500.000000
3/29/2010	12:58:40 PM	H2 MFC set to  0.000000
3/29/2010	12:58:40 PM	BCl3 MFC set to  0.000000
3/29/2010	12:58:40 PM	SiCl4 MFC set to  0.000000
3/29/2010	12:58:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	12:58:40 PM	Tube furnace set to 0
3/29/2010	1:18:40 PM	Helium valve closed
3/29/2010	1:18:40 PM	H2 valve closed
3/29/2010	1:18:40 PM	BCl3 valve closed
3/29/2010	1:18:40 PM	PH3 valve closed
3/29/2010	1:18:40 PM	SiCl4 pre valve closed
3/29/2010	1:18:40 PM	SiCl4 post valve closed
3/29/2010	1:18:40 PM	Main Vac valve closed
3/29/2010	1:18:40 PM	Bypass valve closed
3/29/2010	1:18:40 PM	Bubbler valve closed
3/29/2010	1:18:40 PM	Helium MFC set to  0.000000
3/29/2010	1:18:40 PM	H2 MFC set to  0.000000
3/29/2010	1:18:40 PM	BCl3 MFC set to  0.000000
3/29/2010	1:18:40 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:18:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:18:40 PM	Tube furnace set to 0
3/29/2010	1:18:41 PM	Run finished at 1:18 PM
3/29/2010	1:22:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	1:22:46 PM	Recipe started at 1:22 PM
3/29/2010	1:22:46 PM	Helium valve closed
3/29/2010	1:22:46 PM	H2 valve closed
3/29/2010	1:22:46 PM	BCl3 valve closed
3/29/2010	1:22:46 PM	PH3 valve closed
3/29/2010	1:22:46 PM	SiCl4 pre valve closed
3/29/2010	1:22:46 PM	SiCl4 post valve closed
3/29/2010	1:22:46 PM	Main Vac valve closed
3/29/2010	1:22:46 PM	Bubbler valve closed
3/29/2010	1:22:46 PM	Bypass valve opened
3/29/2010	1:22:46 PM	Helium MFC set to  0.000000
3/29/2010	1:22:46 PM	H2 MFC set to  0.000000
3/29/2010	1:22:46 PM	BCl3 MFC set to  0.000000
3/29/2010	1:22:46 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:22:46 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:22:46 PM	Tube furnace set to 0
3/29/2010	1:23:17 PM	Helium valve closed
3/29/2010	1:23:17 PM	H2 valve closed
3/29/2010	1:23:17 PM	BCl3 valve closed
3/29/2010	1:23:17 PM	PH3 valve closed
3/29/2010	1:23:17 PM	SiCl4 pre valve closed
3/29/2010	1:23:17 PM	SiCl4 post valve closed
3/29/2010	1:23:17 PM	Bubbler valve closed
3/29/2010	1:23:17 PM	Main Vac valve opened
3/29/2010	1:23:17 PM	Bypass valve opened
3/29/2010	1:23:17 PM	Helium MFC set to  0.000000
3/29/2010	1:23:17 PM	H2 MFC set to  0.000000
3/29/2010	1:23:17 PM	BCl3 MFC set to  0.000000
3/29/2010	1:23:17 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:23:17 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:23:17 PM	Tube furnace set to 0
3/29/2010	1:23:18 PM	Run finished at 1:23 PM
3/29/2010	1:23:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	1:23:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	1:23:42 PM	Recipe started at 1:23 PM
3/29/2010	1:23:42 PM	H2 valve closed
3/29/2010	1:23:42 PM	BCl3 valve closed
3/29/2010	1:23:42 PM	PH3 valve closed
3/29/2010	1:23:42 PM	SiCl4 pre valve closed
3/29/2010	1:23:42 PM	SiCl4 post valve closed
3/29/2010	1:23:42 PM	Main Vac valve closed
3/29/2010	1:23:42 PM	Bypass valve closed
3/29/2010	1:23:42 PM	Bubbler valve closed
3/29/2010	1:23:42 PM	Helium valve opened
3/29/2010	1:23:42 PM	Helium MFC set to  500.000000
3/29/2010	1:23:42 PM	H2 MFC set to  0.000000
3/29/2010	1:23:42 PM	BCl3 MFC set to  0.000000
3/29/2010	1:23:42 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:23:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:23:42 PM	Tube furnace set to 0
3/29/2010	1:24:59 PM	Helium valve closed
3/29/2010	1:24:59 PM	H2 valve closed
3/29/2010	1:24:59 PM	BCl3 valve closed
3/29/2010	1:24:59 PM	PH3 valve closed
3/29/2010	1:24:59 PM	SiCl4 pre valve closed
3/29/2010	1:24:59 PM	SiCl4 post valve closed
3/29/2010	1:24:59 PM	Main Vac valve closed
3/29/2010	1:24:59 PM	Bypass valve closed
3/29/2010	1:24:59 PM	Bubbler valve closed
3/29/2010	1:24:59 PM	Helium MFC set to  0.000000
3/29/2010	1:24:59 PM	H2 MFC set to  0.000000
3/29/2010	1:24:59 PM	BCl3 MFC set to  0.000000
3/29/2010	1:24:59 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:24:59 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:24:59 PM	Tube furnace set to 0
3/29/2010	1:25:00 PM	Run finished at 1:25 PM
3/29/2010	1:25:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	1:25:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	1:25:04 PM	Recipe started at 1:25 PM
3/29/2010	1:25:04 PM	Helium valve closed
3/29/2010	1:25:04 PM	H2 valve closed
3/29/2010	1:25:04 PM	BCl3 valve closed
3/29/2010	1:25:04 PM	PH3 valve closed
3/29/2010	1:25:04 PM	SiCl4 pre valve closed
3/29/2010	1:25:04 PM	SiCl4 post valve closed
3/29/2010	1:25:04 PM	Main Vac valve closed
3/29/2010	1:25:04 PM	Bubbler valve closed
3/29/2010	1:25:04 PM	Bypass valve opened
3/29/2010	1:25:04 PM	Helium MFC set to  0.000000
3/29/2010	1:25:04 PM	H2 MFC set to  0.000000
3/29/2010	1:25:04 PM	BCl3 MFC set to  0.000000
3/29/2010	1:25:04 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:25:04 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:25:04 PM	Tube furnace set to 0
3/29/2010	1:25:25 PM	Helium valve closed
3/29/2010	1:25:25 PM	H2 valve closed
3/29/2010	1:25:25 PM	BCl3 valve closed
3/29/2010	1:25:25 PM	PH3 valve closed
3/29/2010	1:25:25 PM	SiCl4 pre valve closed
3/29/2010	1:25:25 PM	SiCl4 post valve closed
3/29/2010	1:25:25 PM	Bubbler valve closed
3/29/2010	1:25:25 PM	Main Vac valve opened
3/29/2010	1:25:25 PM	Bypass valve opened
3/29/2010	1:25:25 PM	Helium MFC set to  0.000000
3/29/2010	1:25:25 PM	H2 MFC set to  0.000000
3/29/2010	1:25:25 PM	BCl3 MFC set to  0.000000
3/29/2010	1:25:25 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:25:25 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:25:26 PM	Tube furnace set to 0
3/29/2010	1:25:26 PM	Run finished at 1:25 PM
3/29/2010	1:25:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	1:26:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	1:26:05 PM	Recipe started at 1:26 PM
3/29/2010	1:26:05 PM	H2 valve closed
3/29/2010	1:26:05 PM	BCl3 valve closed
3/29/2010	1:26:05 PM	PH3 valve closed
3/29/2010	1:26:05 PM	SiCl4 pre valve closed
3/29/2010	1:26:05 PM	SiCl4 post valve closed
3/29/2010	1:26:05 PM	Main Vac valve closed
3/29/2010	1:26:05 PM	Bypass valve closed
3/29/2010	1:26:05 PM	Bubbler valve closed
3/29/2010	1:26:05 PM	Helium valve opened
3/29/2010	1:26:05 PM	Helium MFC set to  500.000000
3/29/2010	1:26:05 PM	H2 MFC set to  0.000000
3/29/2010	1:26:05 PM	BCl3 MFC set to  0.000000
3/29/2010	1:26:05 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:26:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:26:05 PM	Tube furnace set to 0
3/29/2010	1:27:22 PM	Helium valve closed
3/29/2010	1:27:22 PM	H2 valve closed
3/29/2010	1:27:22 PM	BCl3 valve closed
3/29/2010	1:27:22 PM	PH3 valve closed
3/29/2010	1:27:22 PM	SiCl4 pre valve closed
3/29/2010	1:27:22 PM	SiCl4 post valve closed
3/29/2010	1:27:22 PM	Main Vac valve closed
3/29/2010	1:27:22 PM	Bypass valve closed
3/29/2010	1:27:22 PM	Bubbler valve closed
3/29/2010	1:27:22 PM	Helium MFC set to  0.000000
3/29/2010	1:27:22 PM	H2 MFC set to  0.000000
3/29/2010	1:27:22 PM	BCl3 MFC set to  0.000000
3/29/2010	1:27:22 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:27:22 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:27:22 PM	Tube furnace set to 0
3/29/2010	1:27:22 PM	Run finished at 1:27 PM
3/29/2010	1:27:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	1:27:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	1:27:27 PM	Recipe started at 1:27 PM
3/29/2010	1:27:27 PM	Helium valve closed
3/29/2010	1:27:27 PM	H2 valve closed
3/29/2010	1:27:27 PM	BCl3 valve closed
3/29/2010	1:27:27 PM	PH3 valve closed
3/29/2010	1:27:27 PM	SiCl4 pre valve closed
3/29/2010	1:27:27 PM	SiCl4 post valve closed
3/29/2010	1:27:27 PM	Main Vac valve closed
3/29/2010	1:27:27 PM	Bubbler valve closed
3/29/2010	1:27:27 PM	Bypass valve opened
3/29/2010	1:27:27 PM	Helium MFC set to  0.000000
3/29/2010	1:27:27 PM	H2 MFC set to  0.000000
3/29/2010	1:27:27 PM	BCl3 MFC set to  0.000000
3/29/2010	1:27:27 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:27:27 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:27:27 PM	Tube furnace set to 0
3/29/2010	1:27:49 PM	Helium valve closed
3/29/2010	1:27:49 PM	H2 valve closed
3/29/2010	1:27:49 PM	BCl3 valve closed
3/29/2010	1:27:49 PM	PH3 valve closed
3/29/2010	1:27:49 PM	SiCl4 pre valve closed
3/29/2010	1:27:49 PM	SiCl4 post valve closed
3/29/2010	1:27:49 PM	Bubbler valve closed
3/29/2010	1:27:49 PM	Main Vac valve opened
3/29/2010	1:27:49 PM	Bypass valve opened
3/29/2010	1:27:49 PM	Helium MFC set to  0.000000
3/29/2010	1:27:49 PM	H2 MFC set to  0.000000
3/29/2010	1:27:49 PM	BCl3 MFC set to  0.000000
3/29/2010	1:27:49 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:27:49 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:27:49 PM	Tube furnace set to 0
3/29/2010	1:27:49 PM	Run finished at 1:27 PM
3/29/2010	1:27:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	1:38:27 PM	Bypass valve closed
3/29/2010	1:38:28 PM	Main Vac valve closed
3/29/2010	1:38:45 PM	Main Vac valve opened
3/29/2010	1:38:45 PM	Bypass valve opened
3/29/2010	1:39:14 PM	Recipe started at 1:39 PM
3/29/2010	1:39:14 PM	Helium valve closed
3/29/2010	1:39:14 PM	BCl3 valve closed
3/29/2010	1:39:14 PM	PH3 valve closed
3/29/2010	1:39:14 PM	SiCl4 pre valve closed
3/29/2010	1:39:14 PM	SiCl4 post valve closed
3/29/2010	1:39:14 PM	Main Vac valve closed
3/29/2010	1:39:14 PM	Bypass valve closed
3/29/2010	1:39:14 PM	Bubbler valve closed
3/29/2010	1:39:14 PM	H2 valve opened
3/29/2010	1:39:14 PM	Helium MFC set to  0.000000
3/29/2010	1:39:14 PM	H2 MFC set to  500.000000
3/29/2010	1:39:14 PM	BCl3 MFC set to  0.000000
3/29/2010	1:39:14 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:39:14 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:39:14 PM	Tube furnace set to 0
3/29/2010	1:40:33 PM	Helium valve closed
3/29/2010	1:40:33 PM	BCl3 valve closed
3/29/2010	1:40:33 PM	PH3 valve closed
3/29/2010	1:40:33 PM	SiCl4 pre valve closed
3/29/2010	1:40:33 PM	SiCl4 post valve closed
3/29/2010	1:40:33 PM	Main Vac valve closed
3/29/2010	1:40:33 PM	Bypass valve closed
3/29/2010	1:40:33 PM	H2 valve opened
3/29/2010	1:40:33 PM	Bubbler valve opened
3/29/2010	1:40:33 PM	Helium MFC set to  0.000000
3/29/2010	1:40:33 PM	H2 MFC set to  500.000000
3/29/2010	1:40:33 PM	BCl3 MFC set to  0.000000
3/29/2010	1:40:33 PM	SiCl4 MFC set to  0.000000
3/29/2010	1:40:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	1:40:33 PM	Tube furnace set to 1000
3/29/2010	2:00:33 PM	Helium valve closed
3/29/2010	2:00:33 PM	PH3 valve closed
3/29/2010	2:00:33 PM	Main Vac valve closed
3/29/2010	2:00:33 PM	Bypass valve closed
3/29/2010	2:00:33 PM	H2 valve opened
3/29/2010	2:00:33 PM	BCl3 valve opened
3/29/2010	2:00:33 PM	SiCl4 pre valve opened
3/29/2010	2:00:33 PM	SiCl4 post valve opened
3/29/2010	2:00:33 PM	Bubbler valve opened
3/29/2010	2:00:33 PM	Helium MFC set to  0.000000
3/29/2010	2:00:33 PM	H2 MFC set to  500.000000
3/29/2010	2:00:33 PM	BCl3 MFC set to  35.000000
3/29/2010	2:00:33 PM	SiCl4 MFC set to  400.000000
3/29/2010	2:00:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:00:33 PM	Tube furnace set to 1000
3/29/2010	2:20:33 PM	H2 valve closed
3/29/2010	2:20:33 PM	BCl3 valve closed
3/29/2010	2:20:33 PM	PH3 valve closed
3/29/2010	2:20:33 PM	SiCl4 pre valve closed
3/29/2010	2:20:33 PM	SiCl4 post valve closed
3/29/2010	2:20:33 PM	Main Vac valve closed
3/29/2010	2:20:33 PM	Bypass valve closed
3/29/2010	2:20:33 PM	Helium valve opened
3/29/2010	2:20:33 PM	Bubbler valve opened
3/29/2010	2:20:33 PM	Helium MFC set to  500.000000
3/29/2010	2:20:33 PM	H2 MFC set to  0.000000
3/29/2010	2:20:33 PM	BCl3 MFC set to  0.000000
3/29/2010	2:20:33 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:20:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:20:33 PM	Tube furnace set to 0
3/29/2010	2:40:33 PM	Helium valve closed
3/29/2010	2:40:33 PM	H2 valve closed
3/29/2010	2:40:33 PM	BCl3 valve closed
3/29/2010	2:40:33 PM	PH3 valve closed
3/29/2010	2:40:33 PM	SiCl4 pre valve closed
3/29/2010	2:40:33 PM	SiCl4 post valve closed
3/29/2010	2:40:33 PM	Main Vac valve closed
3/29/2010	2:40:33 PM	Bypass valve closed
3/29/2010	2:40:33 PM	Bubbler valve closed
3/29/2010	2:40:33 PM	Helium MFC set to  0.000000
3/29/2010	2:40:33 PM	H2 MFC set to  0.000000
3/29/2010	2:40:33 PM	BCl3 MFC set to  0.000000
3/29/2010	2:40:33 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:40:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:40:33 PM	Tube furnace set to 0
3/29/2010	2:40:33 PM	Run finished at 2:40 PM
3/29/2010	2:44:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	2:44:08 PM	Recipe started at 2:44 PM
3/29/2010	2:44:08 PM	Helium valve closed
3/29/2010	2:44:08 PM	H2 valve closed
3/29/2010	2:44:08 PM	BCl3 valve closed
3/29/2010	2:44:08 PM	PH3 valve closed
3/29/2010	2:44:08 PM	SiCl4 pre valve closed
3/29/2010	2:44:08 PM	SiCl4 post valve closed
3/29/2010	2:44:08 PM	Main Vac valve closed
3/29/2010	2:44:08 PM	Bubbler valve closed
3/29/2010	2:44:08 PM	Bypass valve opened
3/29/2010	2:44:08 PM	Helium MFC set to  0.000000
3/29/2010	2:44:08 PM	H2 MFC set to  0.000000
3/29/2010	2:44:08 PM	BCl3 MFC set to  0.000000
3/29/2010	2:44:08 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:44:08 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:44:08 PM	Tube furnace set to 0
3/29/2010	2:44:39 PM	Helium valve closed
3/29/2010	2:44:39 PM	H2 valve closed
3/29/2010	2:44:39 PM	BCl3 valve closed
3/29/2010	2:44:39 PM	PH3 valve closed
3/29/2010	2:44:39 PM	SiCl4 pre valve closed
3/29/2010	2:44:39 PM	SiCl4 post valve closed
3/29/2010	2:44:39 PM	Bubbler valve closed
3/29/2010	2:44:39 PM	Main Vac valve opened
3/29/2010	2:44:39 PM	Bypass valve opened
3/29/2010	2:44:39 PM	Helium MFC set to  0.000000
3/29/2010	2:44:39 PM	H2 MFC set to  0.000000
3/29/2010	2:44:39 PM	BCl3 MFC set to  0.000000
3/29/2010	2:44:39 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:44:39 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:44:39 PM	Tube furnace set to 0
3/29/2010	2:44:39 PM	Run finished at 2:44 PM
3/29/2010	2:44:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	2:44:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	2:44:50 PM	Recipe started at 2:44 PM
3/29/2010	2:44:50 PM	H2 valve closed
3/29/2010	2:44:50 PM	BCl3 valve closed
3/29/2010	2:44:50 PM	PH3 valve closed
3/29/2010	2:44:50 PM	SiCl4 pre valve closed
3/29/2010	2:44:50 PM	SiCl4 post valve closed
3/29/2010	2:44:50 PM	Main Vac valve closed
3/29/2010	2:44:50 PM	Bypass valve closed
3/29/2010	2:44:50 PM	Bubbler valve closed
3/29/2010	2:44:50 PM	Helium valve opened
3/29/2010	2:44:50 PM	Helium MFC set to  500.000000
3/29/2010	2:44:50 PM	H2 MFC set to  0.000000
3/29/2010	2:44:50 PM	BCl3 MFC set to  0.000000
3/29/2010	2:44:50 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:44:50 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:44:50 PM	Tube furnace set to 0
3/29/2010	2:46:08 PM	Helium valve closed
3/29/2010	2:46:08 PM	H2 valve closed
3/29/2010	2:46:08 PM	BCl3 valve closed
3/29/2010	2:46:08 PM	PH3 valve closed
3/29/2010	2:46:08 PM	SiCl4 pre valve closed
3/29/2010	2:46:08 PM	SiCl4 post valve closed
3/29/2010	2:46:08 PM	Main Vac valve closed
3/29/2010	2:46:08 PM	Bypass valve closed
3/29/2010	2:46:08 PM	Bubbler valve closed
3/29/2010	2:46:08 PM	Helium MFC set to  0.000000
3/29/2010	2:46:08 PM	H2 MFC set to  0.000000
3/29/2010	2:46:08 PM	BCl3 MFC set to  0.000000
3/29/2010	2:46:08 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:46:08 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:46:08 PM	Tube furnace set to 0
3/29/2010	2:46:08 PM	Run finished at 2:46 PM
3/29/2010	2:46:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	2:46:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	2:46:11 PM	Recipe started at 2:46 PM
3/29/2010	2:46:11 PM	Helium valve closed
3/29/2010	2:46:11 PM	H2 valve closed
3/29/2010	2:46:11 PM	BCl3 valve closed
3/29/2010	2:46:11 PM	PH3 valve closed
3/29/2010	2:46:11 PM	SiCl4 pre valve closed
3/29/2010	2:46:11 PM	SiCl4 post valve closed
3/29/2010	2:46:11 PM	Main Vac valve closed
3/29/2010	2:46:11 PM	Bubbler valve closed
3/29/2010	2:46:11 PM	Bypass valve opened
3/29/2010	2:46:11 PM	Helium MFC set to  0.000000
3/29/2010	2:46:11 PM	H2 MFC set to  0.000000
3/29/2010	2:46:11 PM	BCl3 MFC set to  0.000000
3/29/2010	2:46:11 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:46:11 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:46:11 PM	Tube furnace set to 0
3/29/2010	2:46:33 PM	Helium valve closed
3/29/2010	2:46:33 PM	H2 valve closed
3/29/2010	2:46:33 PM	BCl3 valve closed
3/29/2010	2:46:33 PM	PH3 valve closed
3/29/2010	2:46:33 PM	SiCl4 pre valve closed
3/29/2010	2:46:33 PM	SiCl4 post valve closed
3/29/2010	2:46:33 PM	Bubbler valve closed
3/29/2010	2:46:33 PM	Main Vac valve opened
3/29/2010	2:46:33 PM	Bypass valve opened
3/29/2010	2:46:33 PM	Helium MFC set to  0.000000
3/29/2010	2:46:33 PM	H2 MFC set to  0.000000
3/29/2010	2:46:33 PM	BCl3 MFC set to  0.000000
3/29/2010	2:46:33 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:46:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:46:33 PM	Tube furnace set to 0
3/29/2010	2:46:33 PM	Run finished at 2:46 PM
3/29/2010	2:46:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	2:46:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	2:46:41 PM	Recipe started at 2:46 PM
3/29/2010	2:46:41 PM	H2 valve closed
3/29/2010	2:46:41 PM	BCl3 valve closed
3/29/2010	2:46:41 PM	PH3 valve closed
3/29/2010	2:46:41 PM	SiCl4 pre valve closed
3/29/2010	2:46:41 PM	SiCl4 post valve closed
3/29/2010	2:46:41 PM	Main Vac valve closed
3/29/2010	2:46:41 PM	Bypass valve closed
3/29/2010	2:46:41 PM	Bubbler valve closed
3/29/2010	2:46:41 PM	Helium valve opened
3/29/2010	2:46:41 PM	Helium MFC set to  500.000000
3/29/2010	2:46:41 PM	H2 MFC set to  0.000000
3/29/2010	2:46:41 PM	BCl3 MFC set to  0.000000
3/29/2010	2:46:41 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:46:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:46:41 PM	Tube furnace set to 0
3/29/2010	2:47:58 PM	Helium valve closed
3/29/2010	2:47:58 PM	H2 valve closed
3/29/2010	2:47:58 PM	BCl3 valve closed
3/29/2010	2:47:58 PM	PH3 valve closed
3/29/2010	2:47:58 PM	SiCl4 pre valve closed
3/29/2010	2:47:58 PM	SiCl4 post valve closed
3/29/2010	2:47:58 PM	Main Vac valve closed
3/29/2010	2:47:58 PM	Bypass valve closed
3/29/2010	2:47:58 PM	Bubbler valve closed
3/29/2010	2:47:58 PM	Helium MFC set to  0.000000
3/29/2010	2:47:58 PM	H2 MFC set to  0.000000
3/29/2010	2:47:58 PM	BCl3 MFC set to  0.000000
3/29/2010	2:47:58 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:47:58 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:47:58 PM	Tube furnace set to 0
3/29/2010	2:47:59 PM	Run finished at 2:47 PM
3/29/2010	2:47:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	2:48:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	2:48:05 PM	Recipe started at 2:48 PM
3/29/2010	2:48:05 PM	Helium valve closed
3/29/2010	2:48:05 PM	H2 valve closed
3/29/2010	2:48:05 PM	BCl3 valve closed
3/29/2010	2:48:05 PM	PH3 valve closed
3/29/2010	2:48:05 PM	SiCl4 pre valve closed
3/29/2010	2:48:05 PM	SiCl4 post valve closed
3/29/2010	2:48:05 PM	Main Vac valve closed
3/29/2010	2:48:05 PM	Bubbler valve closed
3/29/2010	2:48:05 PM	Bypass valve opened
3/29/2010	2:48:05 PM	Helium MFC set to  0.000000
3/29/2010	2:48:05 PM	H2 MFC set to  0.000000
3/29/2010	2:48:05 PM	BCl3 MFC set to  0.000000
3/29/2010	2:48:05 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:48:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:48:05 PM	Tube furnace set to 0
3/29/2010	2:48:27 PM	Helium valve closed
3/29/2010	2:48:27 PM	H2 valve closed
3/29/2010	2:48:27 PM	BCl3 valve closed
3/29/2010	2:48:27 PM	PH3 valve closed
3/29/2010	2:48:27 PM	SiCl4 pre valve closed
3/29/2010	2:48:27 PM	SiCl4 post valve closed
3/29/2010	2:48:27 PM	Bubbler valve closed
3/29/2010	2:48:27 PM	Main Vac valve opened
3/29/2010	2:48:27 PM	Bypass valve opened
3/29/2010	2:48:27 PM	Helium MFC set to  0.000000
3/29/2010	2:48:27 PM	H2 MFC set to  0.000000
3/29/2010	2:48:27 PM	BCl3 MFC set to  0.000000
3/29/2010	2:48:27 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:48:27 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:48:27 PM	Tube furnace set to 0
3/29/2010	2:48:27 PM	Run finished at 2:48 PM
3/29/2010	2:48:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	2:56:38 PM	Bypass valve closed
3/29/2010	2:56:38 PM	Main Vac valve closed
3/29/2010	2:57:03 PM	Bypass valve opened
3/29/2010	2:57:04 PM	Main Vac valve opened
3/29/2010	2:58:23 PM	Recipe started at 2:58 PM
3/29/2010	2:58:23 PM	Helium valve closed
3/29/2010	2:58:23 PM	BCl3 valve closed
3/29/2010	2:58:23 PM	PH3 valve closed
3/29/2010	2:58:23 PM	SiCl4 pre valve closed
3/29/2010	2:58:23 PM	SiCl4 post valve closed
3/29/2010	2:58:23 PM	Main Vac valve closed
3/29/2010	2:58:23 PM	Bypass valve closed
3/29/2010	2:58:23 PM	Bubbler valve closed
3/29/2010	2:58:23 PM	H2 valve opened
3/29/2010	2:58:23 PM	Helium MFC set to  0.000000
3/29/2010	2:58:23 PM	H2 MFC set to  500.000000
3/29/2010	2:58:23 PM	BCl3 MFC set to  0.000000
3/29/2010	2:58:23 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:58:23 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:58:23 PM	Tube furnace set to 0
3/29/2010	2:59:41 PM	Helium valve closed
3/29/2010	2:59:41 PM	BCl3 valve closed
3/29/2010	2:59:41 PM	PH3 valve closed
3/29/2010	2:59:41 PM	SiCl4 pre valve closed
3/29/2010	2:59:41 PM	SiCl4 post valve closed
3/29/2010	2:59:41 PM	Main Vac valve closed
3/29/2010	2:59:41 PM	Bypass valve closed
3/29/2010	2:59:41 PM	H2 valve opened
3/29/2010	2:59:41 PM	Bubbler valve opened
3/29/2010	2:59:41 PM	Helium MFC set to  0.000000
3/29/2010	2:59:41 PM	H2 MFC set to  500.000000
3/29/2010	2:59:41 PM	BCl3 MFC set to  0.000000
3/29/2010	2:59:41 PM	SiCl4 MFC set to  0.000000
3/29/2010	2:59:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	2:59:41 PM	Tube furnace set to 1000
3/29/2010	3:19:41 PM	Helium valve closed
3/29/2010	3:19:41 PM	PH3 valve closed
3/29/2010	3:19:41 PM	Main Vac valve closed
3/29/2010	3:19:41 PM	Bypass valve closed
3/29/2010	3:19:41 PM	H2 valve opened
3/29/2010	3:19:41 PM	BCl3 valve opened
3/29/2010	3:19:41 PM	SiCl4 pre valve opened
3/29/2010	3:19:41 PM	SiCl4 post valve opened
3/29/2010	3:19:41 PM	Bubbler valve opened
3/29/2010	3:19:41 PM	Helium MFC set to  0.000000
3/29/2010	3:19:41 PM	H2 MFC set to  500.000000
3/29/2010	3:19:41 PM	BCl3 MFC set to  35.000000
3/29/2010	3:19:41 PM	SiCl4 MFC set to  400.000000
3/29/2010	3:19:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	3:19:42 PM	Tube furnace set to 1000
3/29/2010	3:39:42 PM	H2 valve closed
3/29/2010	3:39:42 PM	BCl3 valve closed
3/29/2010	3:39:42 PM	PH3 valve closed
3/29/2010	3:39:42 PM	SiCl4 pre valve closed
3/29/2010	3:39:42 PM	SiCl4 post valve closed
3/29/2010	3:39:42 PM	Main Vac valve closed
3/29/2010	3:39:42 PM	Bypass valve closed
3/29/2010	3:39:42 PM	Helium valve opened
3/29/2010	3:39:42 PM	Bubbler valve opened
3/29/2010	3:39:42 PM	Helium MFC set to  500.000000
3/29/2010	3:39:42 PM	H2 MFC set to  0.000000
3/29/2010	3:39:42 PM	BCl3 MFC set to  0.000000
3/29/2010	3:39:42 PM	SiCl4 MFC set to  0.000000
3/29/2010	3:39:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	3:39:42 PM	Tube furnace set to 0
3/29/2010	3:59:42 PM	Helium valve closed
3/29/2010	3:59:42 PM	H2 valve closed
3/29/2010	3:59:42 PM	BCl3 valve closed
3/29/2010	3:59:42 PM	PH3 valve closed
3/29/2010	3:59:42 PM	SiCl4 pre valve closed
3/29/2010	3:59:42 PM	SiCl4 post valve closed
3/29/2010	3:59:42 PM	Main Vac valve closed
3/29/2010	3:59:42 PM	Bypass valve closed
3/29/2010	3:59:42 PM	Bubbler valve closed
3/29/2010	3:59:42 PM	Helium MFC set to  0.000000
3/29/2010	3:59:42 PM	H2 MFC set to  0.000000
3/29/2010	3:59:42 PM	BCl3 MFC set to  0.000000
3/29/2010	3:59:42 PM	SiCl4 MFC set to  0.000000
3/29/2010	3:59:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	3:59:42 PM	Tube furnace set to 0
3/29/2010	3:59:42 PM	Run finished at 3:59 PM
3/29/2010	4:05:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	4:05:30 PM	Recipe started at 4:05 PM
3/29/2010	4:05:30 PM	Helium valve closed
3/29/2010	4:05:30 PM	H2 valve closed
3/29/2010	4:05:30 PM	BCl3 valve closed
3/29/2010	4:05:30 PM	PH3 valve closed
3/29/2010	4:05:30 PM	SiCl4 pre valve closed
3/29/2010	4:05:30 PM	SiCl4 post valve closed
3/29/2010	4:05:30 PM	Main Vac valve closed
3/29/2010	4:05:30 PM	Bubbler valve closed
3/29/2010	4:05:30 PM	Bypass valve opened
3/29/2010	4:05:30 PM	Helium MFC set to  0.000000
3/29/2010	4:05:30 PM	H2 MFC set to  0.000000
3/29/2010	4:05:30 PM	BCl3 MFC set to  0.000000
3/29/2010	4:05:30 PM	SiCl4 MFC set to  0.000000
3/29/2010	4:05:30 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	4:05:31 PM	Tube furnace set to 0
3/29/2010	4:06:02 PM	Helium valve closed
3/29/2010	4:06:02 PM	H2 valve closed
3/29/2010	4:06:02 PM	BCl3 valve closed
3/29/2010	4:06:02 PM	PH3 valve closed
3/29/2010	4:06:02 PM	SiCl4 pre valve closed
3/29/2010	4:06:02 PM	SiCl4 post valve closed
3/29/2010	4:06:02 PM	Bubbler valve closed
3/29/2010	4:06:02 PM	Main Vac valve opened
3/29/2010	4:06:02 PM	Bypass valve opened
3/29/2010	4:06:02 PM	Helium MFC set to  0.000000
3/29/2010	4:06:02 PM	H2 MFC set to  0.000000
3/29/2010	4:06:02 PM	BCl3 MFC set to  0.000000
3/29/2010	4:06:02 PM	SiCl4 MFC set to  0.000000
3/29/2010	4:06:02 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	4:06:02 PM	Tube furnace set to 0
3/29/2010	4:06:02 PM	Run finished at 4:06 PM
3/29/2010	4:06:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	4:06:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	4:06:49 PM	Recipe started at 4:06 PM
3/29/2010	4:06:49 PM	H2 valve closed
3/29/2010	4:06:49 PM	BCl3 valve closed
3/29/2010	4:06:49 PM	PH3 valve closed
3/29/2010	4:06:49 PM	SiCl4 pre valve closed
3/29/2010	4:06:49 PM	SiCl4 post valve closed
3/29/2010	4:06:49 PM	Main Vac valve closed
3/29/2010	4:06:49 PM	Bypass valve closed
3/29/2010	4:06:49 PM	Bubbler valve closed
3/29/2010	4:06:49 PM	Helium valve opened
3/29/2010	4:06:49 PM	Helium MFC set to  500.000000
3/29/2010	4:06:49 PM	H2 MFC set to  0.000000
3/29/2010	4:06:49 PM	BCl3 MFC set to  0.000000
3/29/2010	4:06:49 PM	SiCl4 MFC set to  0.000000
3/29/2010	4:06:49 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	4:06:49 PM	Tube furnace set to 0
3/29/2010	4:08:06 PM	Helium valve closed
3/29/2010	4:08:06 PM	H2 valve closed
3/29/2010	4:08:06 PM	BCl3 valve closed
3/29/2010	4:08:06 PM	PH3 valve closed
3/29/2010	4:08:06 PM	SiCl4 pre valve closed
3/29/2010	4:08:06 PM	SiCl4 post valve closed
3/29/2010	4:08:06 PM	Main Vac valve closed
3/29/2010	4:08:06 PM	Bypass valve closed
3/29/2010	4:08:06 PM	Bubbler valve closed
3/29/2010	4:08:06 PM	Helium MFC set to  0.000000
3/29/2010	4:08:06 PM	H2 MFC set to  0.000000
3/29/2010	4:08:06 PM	BCl3 MFC set to  0.000000
3/29/2010	4:08:06 PM	SiCl4 MFC set to  0.000000
3/29/2010	4:08:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	4:08:06 PM	Tube furnace set to 0
3/29/2010	4:08:06 PM	Run finished at 4:08 PM
3/29/2010	4:08:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	4:08:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	4:08:13 PM	Recipe started at 4:08 PM
3/29/2010	4:08:13 PM	Helium valve closed
3/29/2010	4:08:13 PM	H2 valve closed
3/29/2010	4:08:13 PM	BCl3 valve closed
3/29/2010	4:08:13 PM	PH3 valve closed
3/29/2010	4:08:13 PM	SiCl4 pre valve closed
3/29/2010	4:08:13 PM	SiCl4 post valve closed
3/29/2010	4:08:13 PM	Main Vac valve closed
3/29/2010	4:08:13 PM	Bubbler valve closed
3/29/2010	4:08:13 PM	Bypass valve opened
3/29/2010	4:08:13 PM	Helium MFC set to  0.000000
3/29/2010	4:08:13 PM	H2 MFC set to  0.000000
3/29/2010	4:08:13 PM	BCl3 MFC set to  0.000000
3/29/2010	4:08:13 PM	SiCl4 MFC set to  0.000000
3/29/2010	4:08:13 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	4:08:13 PM	Tube furnace set to 0
3/29/2010	4:08:34 PM	Helium valve closed
3/29/2010	4:08:34 PM	H2 valve closed
3/29/2010	4:08:34 PM	BCl3 valve closed
3/29/2010	4:08:34 PM	PH3 valve closed
3/29/2010	4:08:34 PM	SiCl4 pre valve closed
3/29/2010	4:08:34 PM	SiCl4 post valve closed
3/29/2010	4:08:34 PM	Bubbler valve closed
3/29/2010	4:08:34 PM	Main Vac valve opened
3/29/2010	4:08:34 PM	Bypass valve opened
3/29/2010	4:08:34 PM	Helium MFC set to  0.000000
3/29/2010	4:08:34 PM	H2 MFC set to  0.000000
3/29/2010	4:08:34 PM	BCl3 MFC set to  0.000000
3/29/2010	4:08:34 PM	SiCl4 MFC set to  0.000000
3/29/2010	4:08:34 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	4:08:34 PM	Tube furnace set to 0
3/29/2010	4:08:35 PM	Run finished at 4:08 PM
3/29/2010	4:08:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	6:10:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	6:10:41 PM	Recipe started at 6:10 PM
3/29/2010	6:10:41 PM	H2 valve closed
3/29/2010	6:10:41 PM	BCl3 valve closed
3/29/2010	6:10:41 PM	PH3 valve closed
3/29/2010	6:10:41 PM	SiCl4 pre valve closed
3/29/2010	6:10:41 PM	SiCl4 post valve closed
3/29/2010	6:10:41 PM	Main Vac valve closed
3/29/2010	6:10:41 PM	Bypass valve closed
3/29/2010	6:10:41 PM	Bubbler valve closed
3/29/2010	6:10:41 PM	Helium valve opened
3/29/2010	6:10:41 PM	Helium MFC set to  500.000000
3/29/2010	6:10:41 PM	H2 MFC set to  0.000000
3/29/2010	6:10:41 PM	BCl3 MFC set to  0.000000
3/29/2010	6:10:41 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:10:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:10:41 PM	Tube furnace set to 0
3/29/2010	6:11:58 PM	Helium valve closed
3/29/2010	6:11:58 PM	H2 valve closed
3/29/2010	6:11:58 PM	BCl3 valve closed
3/29/2010	6:11:58 PM	PH3 valve closed
3/29/2010	6:11:58 PM	SiCl4 pre valve closed
3/29/2010	6:11:58 PM	SiCl4 post valve closed
3/29/2010	6:11:58 PM	Main Vac valve closed
3/29/2010	6:11:58 PM	Bypass valve closed
3/29/2010	6:11:58 PM	Bubbler valve closed
3/29/2010	6:11:58 PM	Helium MFC set to  0.000000
3/29/2010	6:11:58 PM	H2 MFC set to  0.000000
3/29/2010	6:11:58 PM	BCl3 MFC set to  0.000000
3/29/2010	6:11:58 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:11:58 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:11:59 PM	Tube furnace set to 0
3/29/2010	6:11:59 PM	Run finished at 6:11 PM
3/29/2010	6:11:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2010	6:22:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	6:22:01 PM	Recipe started at 6:22 PM
3/29/2010	6:22:01 PM	Helium valve closed
3/29/2010	6:22:01 PM	H2 valve closed
3/29/2010	6:22:01 PM	BCl3 valve closed
3/29/2010	6:22:01 PM	PH3 valve closed
3/29/2010	6:22:01 PM	SiCl4 pre valve closed
3/29/2010	6:22:01 PM	SiCl4 post valve closed
3/29/2010	6:22:01 PM	Main Vac valve closed
3/29/2010	6:22:01 PM	Bubbler valve closed
3/29/2010	6:22:01 PM	Bypass valve opened
3/29/2010	6:22:01 PM	Helium MFC set to  0.000000
3/29/2010	6:22:01 PM	H2 MFC set to  0.000000
3/29/2010	6:22:01 PM	BCl3 MFC set to  0.000000
3/29/2010	6:22:01 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:22:01 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:22:01 PM	Tube furnace set to 0
3/29/2010	6:22:32 PM	Helium valve closed
3/29/2010	6:22:32 PM	H2 valve closed
3/29/2010	6:22:32 PM	BCl3 valve closed
3/29/2010	6:22:32 PM	PH3 valve closed
3/29/2010	6:22:32 PM	SiCl4 pre valve closed
3/29/2010	6:22:32 PM	SiCl4 post valve closed
3/29/2010	6:22:32 PM	Bubbler valve closed
3/29/2010	6:22:32 PM	Main Vac valve opened
3/29/2010	6:22:32 PM	Bypass valve opened
3/29/2010	6:22:32 PM	Helium MFC set to  0.000000
3/29/2010	6:22:32 PM	H2 MFC set to  0.000000
3/29/2010	6:22:32 PM	BCl3 MFC set to  0.000000
3/29/2010	6:22:32 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:22:32 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:22:32 PM	Tube furnace set to 0
3/29/2010	6:22:32 PM	Run finished at 6:22 PM
3/29/2010	6:22:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2010	6:23:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/29/2010	6:23:20 PM	Recipe started at 6:23 PM
3/29/2010	6:23:20 PM	H2 valve closed
3/29/2010	6:23:20 PM	BCl3 valve closed
3/29/2010	6:23:20 PM	PH3 valve closed
3/29/2010	6:23:20 PM	SiCl4 pre valve closed
3/29/2010	6:23:20 PM	SiCl4 post valve closed
3/29/2010	6:23:20 PM	Main Vac valve closed
3/29/2010	6:23:20 PM	Bypass valve closed
3/29/2010	6:23:20 PM	Bubbler valve closed
3/29/2010	6:23:20 PM	Helium valve opened
3/29/2010	6:23:20 PM	Helium MFC set to  500.000000
3/29/2010	6:23:20 PM	H2 MFC set to  0.000000
3/29/2010	6:23:20 PM	BCl3 MFC set to  0.000000
3/29/2010	6:23:20 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:23:20 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:23:20 PM	Tube furnace set to 0
3/29/2010	6:24:42 PM	Helium valve closed
3/29/2010	6:24:42 PM	H2 valve closed
3/29/2010	6:24:42 PM	BCl3 valve closed
3/29/2010	6:24:42 PM	PH3 valve closed
3/29/2010	6:24:42 PM	SiCl4 pre valve closed
3/29/2010	6:24:42 PM	SiCl4 post valve closed
3/29/2010	6:24:42 PM	Main Vac valve closed
3/29/2010	6:24:42 PM	Bypass valve closed
3/29/2010	6:24:42 PM	Bubbler valve closed
3/29/2010	6:24:42 PM	Helium MFC set to  0.000000
3/29/2010	6:24:42 PM	H2 MFC set to  0.000000
3/29/2010	6:24:42 PM	BCl3 MFC set to  0.000000
3/29/2010	6:24:42 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:24:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:24:42 PM	Tube furnace set to 0
3/29/2010	6:24:57 PM	Helium valve closed
3/29/2010	6:24:57 PM	H2 valve closed
3/29/2010	6:24:57 PM	BCl3 valve closed
3/29/2010	6:24:57 PM	PH3 valve closed
3/29/2010	6:24:57 PM	SiCl4 pre valve closed
3/29/2010	6:24:57 PM	SiCl4 post valve closed
3/29/2010	6:24:57 PM	Main Vac valve closed
3/29/2010	6:24:57 PM	Bubbler valve closed
3/29/2010	6:24:57 PM	Bypass valve opened
3/29/2010	6:24:57 PM	Helium MFC set to  0.000000
3/29/2010	6:24:57 PM	H2 MFC set to  0.000000
3/29/2010	6:24:57 PM	BCl3 MFC set to  0.000000
3/29/2010	6:24:57 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:24:57 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:24:57 PM	Tube furnace set to 0
3/29/2010	6:25:20 PM	Helium valve closed
3/29/2010	6:25:20 PM	H2 valve closed
3/29/2010	6:25:20 PM	BCl3 valve closed
3/29/2010	6:25:20 PM	PH3 valve closed
3/29/2010	6:25:20 PM	SiCl4 pre valve closed
3/29/2010	6:25:20 PM	SiCl4 post valve closed
3/29/2010	6:25:20 PM	Bubbler valve closed
3/29/2010	6:25:20 PM	Main Vac valve opened
3/29/2010	6:25:20 PM	Bypass valve opened
3/29/2010	6:25:20 PM	Helium MFC set to  0.000000
3/29/2010	6:25:20 PM	H2 MFC set to  0.000000
3/29/2010	6:25:20 PM	BCl3 MFC set to  0.000000
3/29/2010	6:25:20 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:25:20 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:25:20 PM	Tube furnace set to 0
3/29/2010	6:30:20 PM	H2 valve closed
3/29/2010	6:30:20 PM	BCl3 valve closed
3/29/2010	6:30:20 PM	PH3 valve closed
3/29/2010	6:30:20 PM	SiCl4 pre valve closed
3/29/2010	6:30:20 PM	SiCl4 post valve closed
3/29/2010	6:30:20 PM	Main Vac valve closed
3/29/2010	6:30:20 PM	Bypass valve closed
3/29/2010	6:30:20 PM	Bubbler valve closed
3/29/2010	6:30:20 PM	Helium valve opened
3/29/2010	6:30:20 PM	Helium MFC set to  500.000000
3/29/2010	6:30:20 PM	H2 MFC set to  0.000000
3/29/2010	6:30:20 PM	BCl3 MFC set to  0.000000
3/29/2010	6:30:20 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:30:20 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:30:20 PM	Tube furnace set to 0
3/29/2010	6:31:41 PM	Helium valve closed
3/29/2010	6:31:41 PM	H2 valve closed
3/29/2010	6:31:41 PM	BCl3 valve closed
3/29/2010	6:31:41 PM	PH3 valve closed
3/29/2010	6:31:41 PM	SiCl4 pre valve closed
3/29/2010	6:31:41 PM	SiCl4 post valve closed
3/29/2010	6:31:41 PM	Main Vac valve closed
3/29/2010	6:31:41 PM	Bypass valve closed
3/29/2010	6:31:41 PM	Bubbler valve closed
3/29/2010	6:31:41 PM	Helium MFC set to  0.000000
3/29/2010	6:31:41 PM	H2 MFC set to  0.000000
3/29/2010	6:31:41 PM	BCl3 MFC set to  0.000000
3/29/2010	6:31:41 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:31:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:31:41 PM	Tube furnace set to 0
3/29/2010	6:31:56 PM	Helium valve closed
3/29/2010	6:31:56 PM	H2 valve closed
3/29/2010	6:31:56 PM	BCl3 valve closed
3/29/2010	6:31:56 PM	PH3 valve closed
3/29/2010	6:31:56 PM	SiCl4 pre valve closed
3/29/2010	6:31:56 PM	SiCl4 post valve closed
3/29/2010	6:31:56 PM	Main Vac valve closed
3/29/2010	6:31:56 PM	Bubbler valve closed
3/29/2010	6:31:56 PM	Bypass valve opened
3/29/2010	6:31:57 PM	Helium MFC set to  0.000000
3/29/2010	6:31:57 PM	H2 MFC set to  0.000000
3/29/2010	6:31:57 PM	BCl3 MFC set to  0.000000
3/29/2010	6:31:57 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:31:57 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:31:57 PM	Tube furnace set to 0
3/29/2010	6:32:19 PM	Helium valve closed
3/29/2010	6:32:19 PM	H2 valve closed
3/29/2010	6:32:19 PM	BCl3 valve closed
3/29/2010	6:32:19 PM	PH3 valve closed
3/29/2010	6:32:19 PM	SiCl4 pre valve closed
3/29/2010	6:32:19 PM	SiCl4 post valve closed
3/29/2010	6:32:19 PM	Bubbler valve closed
3/29/2010	6:32:19 PM	Main Vac valve opened
3/29/2010	6:32:19 PM	Bypass valve opened
3/29/2010	6:32:19 PM	Helium MFC set to  0.000000
3/29/2010	6:32:19 PM	H2 MFC set to  0.000000
3/29/2010	6:32:19 PM	BCl3 MFC set to  0.000000
3/29/2010	6:32:19 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:32:19 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:32:19 PM	Tube furnace set to 0
3/29/2010	6:37:19 PM	H2 valve closed
3/29/2010	6:37:19 PM	BCl3 valve closed
3/29/2010	6:37:19 PM	PH3 valve closed
3/29/2010	6:37:19 PM	SiCl4 pre valve closed
3/29/2010	6:37:19 PM	SiCl4 post valve closed
3/29/2010	6:37:19 PM	Main Vac valve closed
3/29/2010	6:37:19 PM	Bypass valve closed
3/29/2010	6:37:19 PM	Bubbler valve closed
3/29/2010	6:37:19 PM	Helium valve opened
3/29/2010	6:37:19 PM	Helium MFC set to  500.000000
3/29/2010	6:37:19 PM	H2 MFC set to  0.000000
3/29/2010	6:37:19 PM	BCl3 MFC set to  0.000000
3/29/2010	6:37:19 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:37:19 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:37:19 PM	Tube furnace set to 0
3/29/2010	6:38:40 PM	Helium valve closed
3/29/2010	6:38:40 PM	H2 valve closed
3/29/2010	6:38:40 PM	BCl3 valve closed
3/29/2010	6:38:40 PM	PH3 valve closed
3/29/2010	6:38:40 PM	SiCl4 pre valve closed
3/29/2010	6:38:40 PM	SiCl4 post valve closed
3/29/2010	6:38:40 PM	Main Vac valve closed
3/29/2010	6:38:40 PM	Bypass valve closed
3/29/2010	6:38:40 PM	Bubbler valve closed
3/29/2010	6:38:40 PM	Helium MFC set to  0.000000
3/29/2010	6:38:40 PM	H2 MFC set to  0.000000
3/29/2010	6:38:40 PM	BCl3 MFC set to  0.000000
3/29/2010	6:38:40 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:38:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:38:40 PM	Tube furnace set to 0
3/29/2010	6:38:55 PM	Helium valve closed
3/29/2010	6:38:55 PM	H2 valve closed
3/29/2010	6:38:55 PM	BCl3 valve closed
3/29/2010	6:38:55 PM	PH3 valve closed
3/29/2010	6:38:55 PM	SiCl4 pre valve closed
3/29/2010	6:38:55 PM	SiCl4 post valve closed
3/29/2010	6:38:55 PM	Main Vac valve closed
3/29/2010	6:38:55 PM	Bubbler valve closed
3/29/2010	6:38:55 PM	Bypass valve opened
3/29/2010	6:38:55 PM	Helium MFC set to  0.000000
3/29/2010	6:38:55 PM	H2 MFC set to  0.000000
3/29/2010	6:38:55 PM	BCl3 MFC set to  0.000000
3/29/2010	6:38:56 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:38:56 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:38:56 PM	Tube furnace set to 0
3/29/2010	6:39:18 PM	Helium valve closed
3/29/2010	6:39:18 PM	H2 valve closed
3/29/2010	6:39:18 PM	BCl3 valve closed
3/29/2010	6:39:18 PM	PH3 valve closed
3/29/2010	6:39:18 PM	SiCl4 pre valve closed
3/29/2010	6:39:18 PM	SiCl4 post valve closed
3/29/2010	6:39:18 PM	Bubbler valve closed
3/29/2010	6:39:18 PM	Main Vac valve opened
3/29/2010	6:39:18 PM	Bypass valve opened
3/29/2010	6:39:18 PM	Helium MFC set to  0.000000
3/29/2010	6:39:18 PM	H2 MFC set to  0.000000
3/29/2010	6:39:18 PM	BCl3 MFC set to  0.000000
3/29/2010	6:39:18 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:39:18 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:39:18 PM	Tube furnace set to 0
3/29/2010	6:44:18 PM	Helium valve closed
3/29/2010	6:44:18 PM	H2 valve closed
3/29/2010	6:44:18 PM	BCl3 valve closed
3/29/2010	6:44:18 PM	PH3 valve closed
3/29/2010	6:44:18 PM	SiCl4 pre valve closed
3/29/2010	6:44:18 PM	SiCl4 post valve closed
3/29/2010	6:44:18 PM	Bubbler valve closed
3/29/2010	6:44:18 PM	Main Vac valve opened
3/29/2010	6:44:18 PM	Bypass valve opened
3/29/2010	6:44:18 PM	Helium MFC set to  0.000000
3/29/2010	6:44:18 PM	H2 MFC set to  0.000000
3/29/2010	6:44:18 PM	BCl3 MFC set to  0.000000
3/29/2010	6:44:18 PM	SiCl4 MFC set to  0.000000
3/29/2010	6:44:18 PM	Bypass solenoid MFC set to  0.000000
3/29/2010	6:44:18 PM	Tube furnace set to 0
3/29/2010	6:44:19 PM	Run finished at 6:44 PM
3/29/2010	6:44:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
